JPH019161Y2 - - Google Patents
Info
- Publication number
- JPH019161Y2 JPH019161Y2 JP9686883U JP9686883U JPH019161Y2 JP H019161 Y2 JPH019161 Y2 JP H019161Y2 JP 9686883 U JP9686883 U JP 9686883U JP 9686883 U JP9686883 U JP 9686883U JP H019161 Y2 JPH019161 Y2 JP H019161Y2
- Authority
- JP
- Japan
- Prior art keywords
- take
- dust
- wafer
- loading platform
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 25
- 239000000428 dust Substances 0.000 claims description 15
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000969 carrier Substances 0.000 claims description 3
- 238000005192 partition Methods 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9686883U JPS605114U (ja) | 1983-06-23 | 1983-06-23 | ウエハ−搬送車 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9686883U JPS605114U (ja) | 1983-06-23 | 1983-06-23 | ウエハ−搬送車 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS605114U JPS605114U (ja) | 1985-01-14 |
| JPH019161Y2 true JPH019161Y2 (enExample) | 1989-03-13 |
Family
ID=30230666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9686883U Granted JPS605114U (ja) | 1983-06-23 | 1983-06-23 | ウエハ−搬送車 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS605114U (enExample) |
-
1983
- 1983-06-23 JP JP9686883U patent/JPS605114U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS605114U (ja) | 1985-01-14 |
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