JPS605114U - ウエハ−搬送車 - Google Patents

ウエハ−搬送車

Info

Publication number
JPS605114U
JPS605114U JP9686883U JP9686883U JPS605114U JP S605114 U JPS605114 U JP S605114U JP 9686883 U JP9686883 U JP 9686883U JP 9686883 U JP9686883 U JP 9686883U JP S605114 U JPS605114 U JP S605114U
Authority
JP
Japan
Prior art keywords
transport vehicle
wafer transport
partition plate
right sides
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9686883U
Other languages
English (en)
Japanese (ja)
Other versions
JPH019161Y2 (enExample
Inventor
信一 古川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP9686883U priority Critical patent/JPS605114U/ja
Publication of JPS605114U publication Critical patent/JPS605114U/ja
Application granted granted Critical
Publication of JPH019161Y2 publication Critical patent/JPH019161Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP9686883U 1983-06-23 1983-06-23 ウエハ−搬送車 Granted JPS605114U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9686883U JPS605114U (ja) 1983-06-23 1983-06-23 ウエハ−搬送車

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9686883U JPS605114U (ja) 1983-06-23 1983-06-23 ウエハ−搬送車

Publications (2)

Publication Number Publication Date
JPS605114U true JPS605114U (ja) 1985-01-14
JPH019161Y2 JPH019161Y2 (enExample) 1989-03-13

Family

ID=30230666

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9686883U Granted JPS605114U (ja) 1983-06-23 1983-06-23 ウエハ−搬送車

Country Status (1)

Country Link
JP (1) JPS605114U (enExample)

Also Published As

Publication number Publication date
JPH019161Y2 (enExample) 1989-03-13

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