JPS6242381B2 - - Google Patents

Info

Publication number
JPS6242381B2
JPS6242381B2 JP57139017A JP13901782A JPS6242381B2 JP S6242381 B2 JPS6242381 B2 JP S6242381B2 JP 57139017 A JP57139017 A JP 57139017A JP 13901782 A JP13901782 A JP 13901782A JP S6242381 B2 JPS6242381 B2 JP S6242381B2
Authority
JP
Japan
Prior art keywords
wafer
air flow
opening
dust
conduit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57139017A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5928355A (ja
Inventor
Akira Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP57139017A priority Critical patent/JPS5928355A/ja
Publication of JPS5928355A publication Critical patent/JPS5928355A/ja
Publication of JPS6242381B2 publication Critical patent/JPS6242381B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0402—
    • H10P72/3404—
    • H10P72/50—

Landscapes

  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP57139017A 1982-08-10 1982-08-10 半導体製造装置 Granted JPS5928355A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57139017A JPS5928355A (ja) 1982-08-10 1982-08-10 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57139017A JPS5928355A (ja) 1982-08-10 1982-08-10 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5928355A JPS5928355A (ja) 1984-02-15
JPS6242381B2 true JPS6242381B2 (enExample) 1987-09-08

Family

ID=15235525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57139017A Granted JPS5928355A (ja) 1982-08-10 1982-08-10 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5928355A (enExample)

Also Published As

Publication number Publication date
JPS5928355A (ja) 1984-02-15

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