JPS5928355A - 半導体製造装置 - Google Patents

半導体製造装置

Info

Publication number
JPS5928355A
JPS5928355A JP57139017A JP13901782A JPS5928355A JP S5928355 A JPS5928355 A JP S5928355A JP 57139017 A JP57139017 A JP 57139017A JP 13901782 A JP13901782 A JP 13901782A JP S5928355 A JPS5928355 A JP S5928355A
Authority
JP
Japan
Prior art keywords
stocker
aperture
dust
wafer
space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57139017A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242381B2 (enExample
Inventor
Akira Watanabe
章 渡辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57139017A priority Critical patent/JPS5928355A/ja
Publication of JPS5928355A publication Critical patent/JPS5928355A/ja
Publication of JPS6242381B2 publication Critical patent/JPS6242381B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/0402—
    • H10P72/3404—
    • H10P72/50—

Landscapes

  • Packaging For Recording Disks (AREA)
  • Packaging Frangible Articles (AREA)
JP57139017A 1982-08-10 1982-08-10 半導体製造装置 Granted JPS5928355A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57139017A JPS5928355A (ja) 1982-08-10 1982-08-10 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57139017A JPS5928355A (ja) 1982-08-10 1982-08-10 半導体製造装置

Publications (2)

Publication Number Publication Date
JPS5928355A true JPS5928355A (ja) 1984-02-15
JPS6242381B2 JPS6242381B2 (enExample) 1987-09-08

Family

ID=15235525

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57139017A Granted JPS5928355A (ja) 1982-08-10 1982-08-10 半導体製造装置

Country Status (1)

Country Link
JP (1) JPS5928355A (enExample)

Also Published As

Publication number Publication date
JPS6242381B2 (enExample) 1987-09-08

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