JPH018714Y2 - - Google Patents
Info
- Publication number
- JPH018714Y2 JPH018714Y2 JP18464584U JP18464584U JPH018714Y2 JP H018714 Y2 JPH018714 Y2 JP H018714Y2 JP 18464584 U JP18464584 U JP 18464584U JP 18464584 U JP18464584 U JP 18464584U JP H018714 Y2 JPH018714 Y2 JP H018714Y2
- Authority
- JP
- Japan
- Prior art keywords
- leak valve
- pump
- leak
- molecular pump
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 239000011148 porous material Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18464584U JPH018714Y2 (de) | 1984-12-05 | 1984-12-05 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18464584U JPH018714Y2 (de) | 1984-12-05 | 1984-12-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6199694U JPS6199694U (de) | 1986-06-25 |
JPH018714Y2 true JPH018714Y2 (de) | 1989-03-08 |
Family
ID=30742130
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18464584U Expired JPH018714Y2 (de) | 1984-12-05 | 1984-12-05 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH018714Y2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2466145A3 (de) * | 2010-12-17 | 2015-01-07 | Pfeiffer Vacuum GmbH | Verfahren zum Belüften einer Vakuumpumpe and Anordnung mit einer Vakuumpumpe |
EP2960520A1 (de) * | 2014-06-26 | 2015-12-30 | Pfeiffer Vacuum Gmbh | Verfahren und vorrichtung zum fluten einer vakuumkammer |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007051045B4 (de) * | 2007-10-25 | 2020-11-12 | Pfeiffer Vacuum Gmbh | Anordnung mit Vakuumpumpe und Verfahren |
GB2552958B (en) * | 2016-08-15 | 2019-10-30 | Edwards Ltd | Turbo pump vent assembly and method |
EP3339651B1 (de) * | 2016-12-23 | 2019-05-01 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
1984
- 1984-12-05 JP JP18464584U patent/JPH018714Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2466145A3 (de) * | 2010-12-17 | 2015-01-07 | Pfeiffer Vacuum GmbH | Verfahren zum Belüften einer Vakuumpumpe and Anordnung mit einer Vakuumpumpe |
EP2960520A1 (de) * | 2014-06-26 | 2015-12-30 | Pfeiffer Vacuum Gmbh | Verfahren und vorrichtung zum fluten einer vakuumkammer |
Also Published As
Publication number | Publication date |
---|---|
JPS6199694U (de) | 1986-06-25 |
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