JPH0247472Y2 - - Google Patents
Info
- Publication number
- JPH0247472Y2 JPH0247472Y2 JP5983386U JP5983386U JPH0247472Y2 JP H0247472 Y2 JPH0247472 Y2 JP H0247472Y2 JP 5983386 U JP5983386 U JP 5983386U JP 5983386 U JP5983386 U JP 5983386U JP H0247472 Y2 JPH0247472 Y2 JP H0247472Y2
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- gas
- cleaning
- airtightness
- solenoid valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 claims description 30
- 238000012360 testing method Methods 0.000 claims description 22
- 238000007689 inspection Methods 0.000 claims description 9
- 239000007789 gas Substances 0.000 description 40
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000011084 recovery Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000006386 memory function Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5983386U JPH0247472Y2 (de) | 1986-04-21 | 1986-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5983386U JPH0247472Y2 (de) | 1986-04-21 | 1986-04-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62170547U JPS62170547U (de) | 1987-10-29 |
| JPH0247472Y2 true JPH0247472Y2 (de) | 1990-12-13 |
Family
ID=30891696
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5983386U Expired JPH0247472Y2 (de) | 1986-04-21 | 1986-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0247472Y2 (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU3123789A (en) * | 1988-07-20 | 1990-01-25 | Expertek, Inc. | Fuel tank leak detection apparatus |
| JP5115110B2 (ja) * | 2007-09-13 | 2013-01-09 | セイコーエプソン株式会社 | 圧電振動子の気密検査装置及び気密検査方法 |
| JP4665004B2 (ja) * | 2008-02-25 | 2011-04-06 | カヤバ工業株式会社 | 漏れ検査装置および漏れ検査方法 |
-
1986
- 1986-04-21 JP JP5983386U patent/JPH0247472Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62170547U (de) | 1987-10-29 |
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