JPH018714Y2 - - Google Patents

Info

Publication number
JPH018714Y2
JPH018714Y2 JP18464584U JP18464584U JPH018714Y2 JP H018714 Y2 JPH018714 Y2 JP H018714Y2 JP 18464584 U JP18464584 U JP 18464584U JP 18464584 U JP18464584 U JP 18464584U JP H018714 Y2 JPH018714 Y2 JP H018714Y2
Authority
JP
Japan
Prior art keywords
leak valve
pump
leak
molecular pump
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18464584U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6199694U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18464584U priority Critical patent/JPH018714Y2/ja
Publication of JPS6199694U publication Critical patent/JPS6199694U/ja
Application granted granted Critical
Publication of JPH018714Y2 publication Critical patent/JPH018714Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP18464584U 1984-12-05 1984-12-05 Expired JPH018714Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18464584U JPH018714Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-05 1984-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18464584U JPH018714Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-05 1984-12-05

Publications (2)

Publication Number Publication Date
JPS6199694U JPS6199694U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-25
JPH018714Y2 true JPH018714Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-03-08

Family

ID=30742130

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18464584U Expired JPH018714Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1984-12-05 1984-12-05

Country Status (1)

Country Link
JP (1) JPH018714Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2466145A3 (de) * 2010-12-17 2015-01-07 Pfeiffer Vacuum GmbH Verfahren zum Belüften einer Vakuumpumpe and Anordnung mit einer Vakuumpumpe
EP2960520A1 (de) * 2014-06-26 2015-12-30 Pfeiffer Vacuum Gmbh Verfahren und vorrichtung zum fluten einer vakuumkammer

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007051045B4 (de) * 2007-10-25 2020-11-12 Pfeiffer Vacuum Gmbh Anordnung mit Vakuumpumpe und Verfahren
GB2552958B (en) * 2016-08-15 2019-10-30 Edwards Ltd Turbo pump vent assembly and method
EP3339651B1 (de) * 2016-12-23 2019-05-01 Pfeiffer Vacuum Gmbh Vakuumpumpe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2466145A3 (de) * 2010-12-17 2015-01-07 Pfeiffer Vacuum GmbH Verfahren zum Belüften einer Vakuumpumpe and Anordnung mit einer Vakuumpumpe
EP2960520A1 (de) * 2014-06-26 2015-12-30 Pfeiffer Vacuum Gmbh Verfahren und vorrichtung zum fluten einer vakuumkammer

Also Published As

Publication number Publication date
JPS6199694U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-06-25

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