JPH0186236U - - Google Patents
Info
- Publication number
- JPH0186236U JPH0186236U JP18250387U JP18250387U JPH0186236U JP H0186236 U JPH0186236 U JP H0186236U JP 18250387 U JP18250387 U JP 18250387U JP 18250387 U JP18250387 U JP 18250387U JP H0186236 U JPH0186236 U JP H0186236U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- pressure cvd
- low
- diameter
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004518 low pressure chemical vapour deposition Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000010409 thin film Substances 0.000 claims 2
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000010408 film Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18250387U JPH0186236U (ar) | 1987-11-30 | 1987-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18250387U JPH0186236U (ar) | 1987-11-30 | 1987-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0186236U true JPH0186236U (ar) | 1989-06-07 |
Family
ID=31473950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18250387U Pending JPH0186236U (ar) | 1987-11-30 | 1987-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0186236U (ar) |
-
1987
- 1987-11-30 JP JP18250387U patent/JPH0186236U/ja active Pending
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