JPH0179856U - - Google Patents
Info
- Publication number
- JPH0179856U JPH0179856U JP1987176143U JP17614387U JPH0179856U JP H0179856 U JPH0179856 U JP H0179856U JP 1987176143 U JP1987176143 U JP 1987176143U JP 17614387 U JP17614387 U JP 17614387U JP H0179856 U JPH0179856 U JP H0179856U
- Authority
- JP
- Japan
- Prior art keywords
- capacitive element
- wall
- dielectric film
- semiconductor
- conductive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
- Dram (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176143U JPH0179856U (hu) | 1987-11-18 | 1987-11-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987176143U JPH0179856U (hu) | 1987-11-18 | 1987-11-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0179856U true JPH0179856U (hu) | 1989-05-29 |
Family
ID=31467899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987176143U Pending JPH0179856U (hu) | 1987-11-18 | 1987-11-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0179856U (hu) |
-
1987
- 1987-11-18 JP JP1987176143U patent/JPH0179856U/ja active Pending
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