JPH0159354B2 - - Google Patents

Info

Publication number
JPH0159354B2
JPH0159354B2 JP62188029A JP18802987A JPH0159354B2 JP H0159354 B2 JPH0159354 B2 JP H0159354B2 JP 62188029 A JP62188029 A JP 62188029A JP 18802987 A JP18802987 A JP 18802987A JP H0159354 B2 JPH0159354 B2 JP H0159354B2
Authority
JP
Japan
Prior art keywords
chamber
vacuum processing
unloading
chambers
load
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP62188029A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6431970A (en
Inventor
Hidetaka Jo
Osamu Watanabe
Katsuya Okumura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Tokuda Seisakusho Co Ltd
Original Assignee
Toshiba Corp
Tokuda Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokuda Seisakusho Co Ltd filed Critical Toshiba Corp
Priority to JP18802987A priority Critical patent/JPS6431970A/ja
Publication of JPS6431970A publication Critical patent/JPS6431970A/ja
Publication of JPH0159354B2 publication Critical patent/JPH0159354B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP18802987A 1987-07-28 1987-07-28 Vacuum treatment equipment Granted JPS6431970A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18802987A JPS6431970A (en) 1987-07-28 1987-07-28 Vacuum treatment equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18802987A JPS6431970A (en) 1987-07-28 1987-07-28 Vacuum treatment equipment

Publications (2)

Publication Number Publication Date
JPS6431970A JPS6431970A (en) 1989-02-02
JPH0159354B2 true JPH0159354B2 (OSRAM) 1989-12-15

Family

ID=16216418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18802987A Granted JPS6431970A (en) 1987-07-28 1987-07-28 Vacuum treatment equipment

Country Status (1)

Country Link
JP (1) JPS6431970A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2644912B2 (ja) 1990-08-29 1997-08-25 株式会社日立製作所 真空処理装置及びその運転方法
USRE39756E1 (en) * 1990-08-29 2007-08-07 Hitachi, Ltd. Vacuum processing operating method with wafers, substrates and/or semiconductors
US7089680B1 (en) 1990-08-29 2006-08-15 Hitachi, Ltd. Vacuum processing apparatus and operating method therefor
USRE39824E1 (en) * 1990-08-29 2007-09-11 Hitachi, Ltd. Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61113766A (ja) * 1984-11-09 1986-05-31 Nissin Electric Co Ltd エンドステ−シヨン

Also Published As

Publication number Publication date
JPS6431970A (en) 1989-02-02

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees