JPH0158047B2 - - Google Patents

Info

Publication number
JPH0158047B2
JPH0158047B2 JP60264741A JP26474185A JPH0158047B2 JP H0158047 B2 JPH0158047 B2 JP H0158047B2 JP 60264741 A JP60264741 A JP 60264741A JP 26474185 A JP26474185 A JP 26474185A JP H0158047 B2 JPH0158047 B2 JP H0158047B2
Authority
JP
Japan
Prior art keywords
cutting
cleaning water
plate
wafer
water supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60264741A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61148004A (ja
Inventor
Tsutomu Mimata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60264741A priority Critical patent/JPS61148004A/ja
Publication of JPS61148004A publication Critical patent/JPS61148004A/ja
Publication of JPH0158047B2 publication Critical patent/JPH0158047B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Dicing (AREA)
JP60264741A 1985-11-27 1985-11-27 ダイシング装置 Granted JPS61148004A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60264741A JPS61148004A (ja) 1985-11-27 1985-11-27 ダイシング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60264741A JPS61148004A (ja) 1985-11-27 1985-11-27 ダイシング装置

Publications (2)

Publication Number Publication Date
JPS61148004A JPS61148004A (ja) 1986-07-05
JPH0158047B2 true JPH0158047B2 (en)van) 1989-12-08

Family

ID=17407530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60264741A Granted JPS61148004A (ja) 1985-11-27 1985-11-27 ダイシング装置

Country Status (1)

Country Link
JP (1) JPS61148004A (en)van)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015208796A (ja) * 2014-04-24 2015-11-24 株式会社ディスコ バイト切削装置

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2526738Y2 (ja) * 1990-06-26 1997-02-19 株式会社東京精密 ダイシング機の洗浄装置
JP4777072B2 (ja) * 2006-01-11 2011-09-21 株式会社東京精密 ダイシング装置
WO2013051375A1 (ja) * 2011-10-05 2013-04-11 シャープ株式会社 ダイシング装置及び半導体装置の製造方法
JP6012239B2 (ja) * 2012-04-23 2016-10-25 株式会社ディスコ ウェーハの加工方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1477935A1 (de) * 1963-07-13 1969-08-28 Waldrich Werkzeugmasch Verfahren und Einrichtung zur Kuehlung von Schleifmaschinen mit rasch hin- und herbewegtem Werkstuecktisch
JPS4858771A (en)van) * 1971-11-22 1973-08-17
JPS48104255U (en)van) * 1972-03-11 1973-12-05
JPS4894985A (en)van) * 1972-03-17 1973-12-06
SE354213B (en)van) * 1972-04-10 1973-03-05 Sandvik Ab
JPS493291A (en)van) * 1972-04-22 1974-01-12
JPS6112373A (ja) * 1984-06-29 1986-01-20 Tokyo Electric Co Ltd 印字機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015208796A (ja) * 2014-04-24 2015-11-24 株式会社ディスコ バイト切削装置

Also Published As

Publication number Publication date
JPS61148004A (ja) 1986-07-05

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