JPH0153509B2 - - Google Patents

Info

Publication number
JPH0153509B2
JPH0153509B2 JP56209760A JP20976081A JPH0153509B2 JP H0153509 B2 JPH0153509 B2 JP H0153509B2 JP 56209760 A JP56209760 A JP 56209760A JP 20976081 A JP20976081 A JP 20976081A JP H0153509 B2 JPH0153509 B2 JP H0153509B2
Authority
JP
Japan
Prior art keywords
single crystal
recess
forming
film
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56209760A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58114439A (ja
Inventor
Hajime Kamioka
Mikio Takagi
Motoo Nakano
Takashi Iwai
Noriaki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56209760A priority Critical patent/JPS58114439A/ja
Publication of JPS58114439A publication Critical patent/JPS58114439A/ja
Publication of JPH0153509B2 publication Critical patent/JPH0153509B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Recrystallisation Techniques (AREA)
  • Element Separation (AREA)
JP56209760A 1981-12-28 1981-12-28 半導体装置の製造方法 Granted JPS58114439A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56209760A JPS58114439A (ja) 1981-12-28 1981-12-28 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56209760A JPS58114439A (ja) 1981-12-28 1981-12-28 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS58114439A JPS58114439A (ja) 1983-07-07
JPH0153509B2 true JPH0153509B2 (enExample) 1989-11-14

Family

ID=16578170

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56209760A Granted JPS58114439A (ja) 1981-12-28 1981-12-28 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS58114439A (enExample)

Also Published As

Publication number Publication date
JPS58114439A (ja) 1983-07-07

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