JPH0149015B2 - - Google Patents
Info
- Publication number
- JPH0149015B2 JPH0149015B2 JP58206890A JP20689083A JPH0149015B2 JP H0149015 B2 JPH0149015 B2 JP H0149015B2 JP 58206890 A JP58206890 A JP 58206890A JP 20689083 A JP20689083 A JP 20689083A JP H0149015 B2 JPH0149015 B2 JP H0149015B2
- Authority
- JP
- Japan
- Prior art keywords
- resist
- metal
- pattern
- thickness
- lift
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P50/00—
Landscapes
- Electrodes Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58206890A JPS60100432A (ja) | 1983-11-05 | 1983-11-05 | リフトオフ金属パタ−ン形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58206890A JPS60100432A (ja) | 1983-11-05 | 1983-11-05 | リフトオフ金属パタ−ン形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60100432A JPS60100432A (ja) | 1985-06-04 |
| JPH0149015B2 true JPH0149015B2 (member.php) | 1989-10-23 |
Family
ID=16530741
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58206890A Granted JPS60100432A (ja) | 1983-11-05 | 1983-11-05 | リフトオフ金属パタ−ン形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60100432A (member.php) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5017459A (en) * | 1989-04-26 | 1991-05-21 | Eastman Kodak Company | Lift-off process |
| JPH06140434A (ja) * | 1992-10-26 | 1994-05-20 | Mitsubishi Electric Corp | 電界効果型トランジスタの製造方法 |
| JP3119957B2 (ja) * | 1992-11-30 | 2000-12-25 | 株式会社東芝 | 半導体装置の製造方法 |
| GB2485089B (en) * | 2009-08-24 | 2014-03-12 | Fuji Chemical Company Ltd | Acrylic resin composition, method of manufacturing the same, and architectural material, fashion accessory and optical material formed using the same |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6032350B2 (ja) * | 1977-06-21 | 1985-07-27 | 富士通株式会社 | 半導体装置の製造方法 |
| JPS5646536A (en) * | 1979-09-22 | 1981-04-27 | Nippon Telegr & Teleph Corp <Ntt> | Formation of microminiature electrode |
-
1983
- 1983-11-05 JP JP58206890A patent/JPS60100432A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60100432A (ja) | 1985-06-04 |
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