JPH0149006B2 - - Google Patents
Info
- Publication number
- JPH0149006B2 JPH0149006B2 JP60207521A JP20752185A JPH0149006B2 JP H0149006 B2 JPH0149006 B2 JP H0149006B2 JP 60207521 A JP60207521 A JP 60207521A JP 20752185 A JP20752185 A JP 20752185A JP H0149006 B2 JPH0149006 B2 JP H0149006B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- photodetector
- diffraction grating
- mask
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 15
- 101100269850 Caenorhabditis elegans mask-1 gene Proteins 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 14
- 238000001514 detection method Methods 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60207521A JPS6266632A (ja) | 1985-09-19 | 1985-09-19 | マスクとウエ−ハの位置合わせ方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60207521A JPS6266632A (ja) | 1985-09-19 | 1985-09-19 | マスクとウエ−ハの位置合わせ方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6266632A JPS6266632A (ja) | 1987-03-26 |
JPH0149006B2 true JPH0149006B2 (de) | 1989-10-23 |
Family
ID=16541096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60207521A Granted JPS6266632A (ja) | 1985-09-19 | 1985-09-19 | マスクとウエ−ハの位置合わせ方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6266632A (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07142383A (ja) * | 1993-11-22 | 1995-06-02 | Nec Corp | 現像用センサ装置 |
KR101231207B1 (ko) * | 2011-01-05 | 2013-02-07 | 삼성디스플레이 주식회사 | 증착 마스크 인장용 정렬기판, 이의 제조방법 및 이를 이용한 증착 마스크 인장방법 |
-
1985
- 1985-09-19 JP JP60207521A patent/JPS6266632A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6266632A (ja) | 1987-03-26 |
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