JPH0140921B2 - - Google Patents

Info

Publication number
JPH0140921B2
JPH0140921B2 JP4759481A JP4759481A JPH0140921B2 JP H0140921 B2 JPH0140921 B2 JP H0140921B2 JP 4759481 A JP4759481 A JP 4759481A JP 4759481 A JP4759481 A JP 4759481A JP H0140921 B2 JPH0140921 B2 JP H0140921B2
Authority
JP
Japan
Prior art keywords
hologram
light
displacement
optical element
meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4759481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57161605A (en
Inventor
Joji Matsuda
Koji Tenjinbayashi
Tsuguo Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4759481A priority Critical patent/JPS57161605A/ja
Publication of JPS57161605A publication Critical patent/JPS57161605A/ja
Publication of JPH0140921B2 publication Critical patent/JPH0140921B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/021—Interferometers using holographic techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP4759481A 1981-03-31 1981-03-31 Homogram displacement gauge Granted JPS57161605A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4759481A JPS57161605A (en) 1981-03-31 1981-03-31 Homogram displacement gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4759481A JPS57161605A (en) 1981-03-31 1981-03-31 Homogram displacement gauge

Publications (2)

Publication Number Publication Date
JPS57161605A JPS57161605A (en) 1982-10-05
JPH0140921B2 true JPH0140921B2 (en, 2012) 1989-09-01

Family

ID=12779568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4759481A Granted JPS57161605A (en) 1981-03-31 1981-03-31 Homogram displacement gauge

Country Status (1)

Country Link
JP (1) JPS57161605A (en, 2012)

Also Published As

Publication number Publication date
JPS57161605A (en) 1982-10-05

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