JPH0472161B2 - - Google Patents

Info

Publication number
JPH0472161B2
JPH0472161B2 JP4759581A JP4759581A JPH0472161B2 JP H0472161 B2 JPH0472161 B2 JP H0472161B2 JP 4759581 A JP4759581 A JP 4759581A JP 4759581 A JP4759581 A JP 4759581A JP H0472161 B2 JPH0472161 B2 JP H0472161B2
Authority
JP
Japan
Prior art keywords
hologram
light
optical
interference fringes
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4759581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57161606A (en
Inventor
Joji Matsuda
Koji Tenjinbayashi
Tsuguo Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4759581A priority Critical patent/JPS57161606A/ja
Publication of JPS57161606A publication Critical patent/JPS57161606A/ja
Publication of JPH0472161B2 publication Critical patent/JPH0472161B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP4759581A 1981-03-31 1981-03-31 Inline homogram displacement gauge Granted JPS57161606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4759581A JPS57161606A (en) 1981-03-31 1981-03-31 Inline homogram displacement gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4759581A JPS57161606A (en) 1981-03-31 1981-03-31 Inline homogram displacement gauge

Publications (2)

Publication Number Publication Date
JPS57161606A JPS57161606A (en) 1982-10-05
JPH0472161B2 true JPH0472161B2 (en, 2012) 1992-11-17

Family

ID=12779594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4759581A Granted JPS57161606A (en) 1981-03-31 1981-03-31 Inline homogram displacement gauge

Country Status (1)

Country Link
JP (1) JPS57161606A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244607A (ja) * 1985-08-22 1987-02-26 Tokyo Optical Co Ltd ホログラフイツク干渉計
JPH04282414A (ja) * 1991-03-12 1992-10-07 Hitachi Zosen Corp レーザビームの位置および角度制御装置

Also Published As

Publication number Publication date
JPS57161606A (en) 1982-10-05

Similar Documents

Publication Publication Date Title
KR910008514A (ko) 홀로그래픽 영상화 시스템의 전체 내부반사 광학검사장치 및 방법
JPH0472161B2 (en, 2012)
JPH0575246B2 (en, 2012)
JP3327998B2 (ja) 形状測定方法及び装置
US4466693A (en) Holographic straightness meter
JP2831428B2 (ja) 非球面形状測定機
JPH07229721A (ja) 非球面波発生装置及びそれを用いた非球面形状測定方法
JPH0140921B2 (en, 2012)
JPH06174430A (ja) 中心厚測定方法およびそれに使用する装置
JPH0140283B2 (en, 2012)
JP2753545B2 (ja) 形状測定システム
JPH0140285B2 (en, 2012)
JPH0140289B2 (en, 2012)
JP2004279075A (ja) レンズの偏芯測定方法及び測定装置
JPH0140284B2 (en, 2012)
JP3916991B2 (ja) 圧子形状測定器
JPH0617785B2 (ja) 干渉コントラスト法直線計
JP3003671B2 (ja) 試料表面の高さ検出方法及びその装置
JP2902417B2 (ja) 波面収差測定用干渉装置
JPH05157532A (ja) 測定用計算機ホログラム及びそれを用いた計測方法
JPH0210362B2 (en, 2012)
JPS62106310A (ja) 平行平面板の平行度測定装置
JPS60242304A (ja) 大口径平面鏡の表面形状測定用ホログラム干渉計
JP3214063B2 (ja) ホログラム干渉計装置
JP3061653B2 (ja) 非球面の測定方法および測定装置