JPS57161606A - Inline homogram displacement gauge - Google Patents

Inline homogram displacement gauge

Info

Publication number
JPS57161606A
JPS57161606A JP4759581A JP4759581A JPS57161606A JP S57161606 A JPS57161606 A JP S57161606A JP 4759581 A JP4759581 A JP 4759581A JP 4759581 A JP4759581 A JP 4759581A JP S57161606 A JPS57161606 A JP S57161606A
Authority
JP
Japan
Prior art keywords
light
homogram
displacement
gauge
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4759581A
Other languages
Japanese (ja)
Other versions
JPH0472161B2 (en
Inventor
Joji Matsuda
Kouji Tenjinbayashi
Tsuguo Kono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP4759581A priority Critical patent/JPS57161606A/en
Publication of JPS57161606A publication Critical patent/JPS57161606A/en
Publication of JPH0472161B2 publication Critical patent/JPH0472161B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To enable measuring of a wide displacement, by constituting a gauge such that light axes of object light and reference light in a conventional homogram displacement gauge are positioned in parallel to each other. CONSTITUTION:Light from a laser radiating device 2 is divided into two lights by a beam splitter 3, one light F1 is enlarged by a microscope objective 16 and a colimator lens 19 to illuminate a dispersion plate 5 with the light F1, and it is brought into parallel light after passing through a colimator lens 11 to form object light. The other light F2 is brought into light, whose light axis is parallel to that of an object by a microscope objective 14 and the colimator lens 11, to form reference light. Ths object light and reference light are reflected by a reflecting element 24 secured to a moving object to enter a homogram 4, and an incident object light is project on a screen 6 to measure a spin displacement. A gauge is constituted in a manner of an inline homography, which results in enabling the measurement of a wide displacement.
JP4759581A 1981-03-31 1981-03-31 Inline homogram displacement gauge Granted JPS57161606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4759581A JPS57161606A (en) 1981-03-31 1981-03-31 Inline homogram displacement gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4759581A JPS57161606A (en) 1981-03-31 1981-03-31 Inline homogram displacement gauge

Publications (2)

Publication Number Publication Date
JPS57161606A true JPS57161606A (en) 1982-10-05
JPH0472161B2 JPH0472161B2 (en) 1992-11-17

Family

ID=12779594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4759581A Granted JPS57161606A (en) 1981-03-31 1981-03-31 Inline homogram displacement gauge

Country Status (1)

Country Link
JP (1) JPS57161606A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244607A (en) * 1985-08-22 1987-02-26 Tokyo Optical Co Ltd Holographic interferometer
JPH04282414A (en) * 1991-03-12 1992-10-07 Hitachi Zosen Corp Laser beam position and angle control device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6244607A (en) * 1985-08-22 1987-02-26 Tokyo Optical Co Ltd Holographic interferometer
JPH0585843B2 (en) * 1985-08-22 1993-12-09 Topcon Corp
JPH04282414A (en) * 1991-03-12 1992-10-07 Hitachi Zosen Corp Laser beam position and angle control device

Also Published As

Publication number Publication date
JPH0472161B2 (en) 1992-11-17

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