JPH0137965B2 - - Google Patents
Info
- Publication number
- JPH0137965B2 JPH0137965B2 JP57232251A JP23225182A JPH0137965B2 JP H0137965 B2 JPH0137965 B2 JP H0137965B2 JP 57232251 A JP57232251 A JP 57232251A JP 23225182 A JP23225182 A JP 23225182A JP H0137965 B2 JPH0137965 B2 JP H0137965B2
- Authority
- JP
- Japan
- Prior art keywords
- wax
- overlayer
- case
- chamber
- support layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Filtering Materials (AREA)
- Filtration Of Liquid (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57232251A JPS59120217A (ja) | 1982-12-27 | 1982-12-27 | ワックス濾過装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57232251A JPS59120217A (ja) | 1982-12-27 | 1982-12-27 | ワックス濾過装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59120217A JPS59120217A (ja) | 1984-07-11 |
| JPH0137965B2 true JPH0137965B2 (enrdf_load_stackoverflow) | 1989-08-10 |
Family
ID=16936339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57232251A Granted JPS59120217A (ja) | 1982-12-27 | 1982-12-27 | ワックス濾過装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59120217A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5071457A (en) * | 1985-11-25 | 1991-12-10 | Industrial Filter & Pump Mfg. Co. | Composite for filtering hot gas and method of its manufacture |
| JP2575407B2 (ja) * | 1987-09-02 | 1997-01-22 | 三菱マテリアル株式会社 | ワックス塗布装置 |
| CN114643651B (zh) * | 2022-03-21 | 2024-05-14 | 北京晶格领域半导体有限公司 | 一种碳化硅晶片贴蜡方法和辅助贴蜡装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH603211A5 (en) * | 1975-12-29 | 1978-08-15 | Commissariat Energie Atomique | Tubular filter elements comprising mineral layers on supports |
| JPS5948646B2 (ja) * | 1980-10-20 | 1984-11-28 | コミツサリア タ レネルギ− アトミ−ク | フイルタ−エレメント及びその製造方法 |
-
1982
- 1982-12-27 JP JP57232251A patent/JPS59120217A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59120217A (ja) | 1984-07-11 |
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