JPS59120217A - ワックス濾過装置 - Google Patents
ワックス濾過装置Info
- Publication number
- JPS59120217A JPS59120217A JP57232251A JP23225182A JPS59120217A JP S59120217 A JPS59120217 A JP S59120217A JP 57232251 A JP57232251 A JP 57232251A JP 23225182 A JP23225182 A JP 23225182A JP S59120217 A JPS59120217 A JP S59120217A
- Authority
- JP
- Japan
- Prior art keywords
- wax
- filter
- filtration
- crucible
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001914 filtration Methods 0.000 title claims abstract description 98
- 238000000034 method Methods 0.000 title description 6
- 239000011148 porous material Substances 0.000 claims abstract description 22
- 239000000919 ceramic Substances 0.000 claims abstract description 15
- 239000007787 solid Substances 0.000 abstract description 13
- 238000002844 melting Methods 0.000 abstract description 8
- 230000008018 melting Effects 0.000 abstract description 8
- 239000007789 gas Substances 0.000 abstract description 6
- 239000012535 impurity Substances 0.000 abstract description 5
- 239000011261 inert gas Substances 0.000 abstract description 4
- 239000001993 wax Substances 0.000 description 85
- 235000012431 wafers Nutrition 0.000 description 30
- 239000004065 semiconductor Substances 0.000 description 25
- 238000005498 polishing Methods 0.000 description 22
- 239000002245 particle Substances 0.000 description 20
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000005192 partition Methods 0.000 description 4
- -1 polytetrafluoroethylene Polymers 0.000 description 4
- 239000000203 mixture Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 239000004744 fabric Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 241000272201 Columbiformes Species 0.000 description 1
- 235000008331 Pinus X rigitaeda Nutrition 0.000 description 1
- 235000011613 Pinus brutia Nutrition 0.000 description 1
- 241000018646 Pinus brutia Species 0.000 description 1
- 229920001800 Shellac Polymers 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 235000013871 bee wax Nutrition 0.000 description 1
- 239000012166 beeswax Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000004006 olive oil Substances 0.000 description 1
- 235000008390 olive oil Nutrition 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000012169 petroleum derived wax Substances 0.000 description 1
- 235000019381 petroleum wax Nutrition 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000012173 sealing wax Substances 0.000 description 1
- 235000013874 shellac Nutrition 0.000 description 1
- 239000004208 shellac Substances 0.000 description 1
- ZLGIYFNHBLSMPS-ATJNOEHPSA-N shellac Chemical compound OCCCCCC(O)C(O)CCCCCCCC(O)=O.C1C23[C@H](C(O)=O)CCC2[C@](C)(CO)[C@@H]1C(C(O)=O)=C[C@@H]3O ZLGIYFNHBLSMPS-ATJNOEHPSA-N 0.000 description 1
- 229940113147 shellac Drugs 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000012265 solid product Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Landscapes
- Filtering Materials (AREA)
- Filtration Of Liquid (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57232251A JPS59120217A (ja) | 1982-12-27 | 1982-12-27 | ワックス濾過装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57232251A JPS59120217A (ja) | 1982-12-27 | 1982-12-27 | ワックス濾過装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59120217A true JPS59120217A (ja) | 1984-07-11 |
| JPH0137965B2 JPH0137965B2 (enrdf_load_stackoverflow) | 1989-08-10 |
Family
ID=16936339
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57232251A Granted JPS59120217A (ja) | 1982-12-27 | 1982-12-27 | ワックス濾過装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59120217A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6461919A (en) * | 1987-09-02 | 1989-03-08 | Mitsubishi Metal Corp | Wax applicator |
| US5071457A (en) * | 1985-11-25 | 1991-12-10 | Industrial Filter & Pump Mfg. Co. | Composite for filtering hot gas and method of its manufacture |
| CN114643651A (zh) * | 2022-03-21 | 2022-06-21 | 北京晶格领域半导体有限公司 | 一种碳化硅晶片贴蜡方法和辅助贴蜡装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5284571A (en) * | 1975-12-29 | 1977-07-14 | Commissariat Energie Atomique | Method and system for manufacturing tubular filter members |
| JPS5771604A (en) * | 1980-10-20 | 1982-05-04 | Commissariat Energie Atomique | Filter holder and its manufacture |
-
1982
- 1982-12-27 JP JP57232251A patent/JPS59120217A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5284571A (en) * | 1975-12-29 | 1977-07-14 | Commissariat Energie Atomique | Method and system for manufacturing tubular filter members |
| JPS5771604A (en) * | 1980-10-20 | 1982-05-04 | Commissariat Energie Atomique | Filter holder and its manufacture |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5071457A (en) * | 1985-11-25 | 1991-12-10 | Industrial Filter & Pump Mfg. Co. | Composite for filtering hot gas and method of its manufacture |
| JPS6461919A (en) * | 1987-09-02 | 1989-03-08 | Mitsubishi Metal Corp | Wax applicator |
| CN114643651A (zh) * | 2022-03-21 | 2022-06-21 | 北京晶格领域半导体有限公司 | 一种碳化硅晶片贴蜡方法和辅助贴蜡装置 |
| CN114643651B (zh) * | 2022-03-21 | 2024-05-14 | 北京晶格领域半导体有限公司 | 一种碳化硅晶片贴蜡方法和辅助贴蜡装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0137965B2 (enrdf_load_stackoverflow) | 1989-08-10 |
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