JPH0135489B2 - - Google Patents

Info

Publication number
JPH0135489B2
JPH0135489B2 JP56186274A JP18627481A JPH0135489B2 JP H0135489 B2 JPH0135489 B2 JP H0135489B2 JP 56186274 A JP56186274 A JP 56186274A JP 18627481 A JP18627481 A JP 18627481A JP H0135489 B2 JPH0135489 B2 JP H0135489B2
Authority
JP
Japan
Prior art keywords
film
thin film
capacitor
srtio
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56186274A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5886714A (ja
Inventor
Kazuo Eda
Takayuki Eguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP18627481A priority Critical patent/JPS5886714A/ja
Publication of JPS5886714A publication Critical patent/JPS5886714A/ja
Publication of JPH0135489B2 publication Critical patent/JPH0135489B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Ceramic Capacitors (AREA)
JP18627481A 1981-11-19 1981-11-19 薄膜コンデンサの製造方法 Granted JPS5886714A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18627481A JPS5886714A (ja) 1981-11-19 1981-11-19 薄膜コンデンサの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18627481A JPS5886714A (ja) 1981-11-19 1981-11-19 薄膜コンデンサの製造方法

Publications (2)

Publication Number Publication Date
JPS5886714A JPS5886714A (ja) 1983-05-24
JPH0135489B2 true JPH0135489B2 (en, 2012) 1989-07-25

Family

ID=16185425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18627481A Granted JPS5886714A (ja) 1981-11-19 1981-11-19 薄膜コンデンサの製造方法

Country Status (1)

Country Link
JP (1) JPS5886714A (en, 2012)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01175714A (ja) * 1987-12-29 1989-07-12 Matsushita Electric Ind Co Ltd 薄膜誘電体コンデンサ
JP2684677B2 (ja) * 1988-05-25 1997-12-03 株式会社日立製作所 半導体装置の製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147751A (en) * 1975-06-11 1976-12-18 Matsushita Electric Ind Co Ltd Method of making semiconductive ceramic capacitors
JPS6055976B2 (ja) * 1978-11-24 1985-12-07 株式会社村田製作所 半導体粒界絶縁型積層磁器コンデンサの製造方法

Also Published As

Publication number Publication date
JPS5886714A (ja) 1983-05-24

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