JPH0132661B2 - - Google Patents

Info

Publication number
JPH0132661B2
JPH0132661B2 JP56121114A JP12111481A JPH0132661B2 JP H0132661 B2 JPH0132661 B2 JP H0132661B2 JP 56121114 A JP56121114 A JP 56121114A JP 12111481 A JP12111481 A JP 12111481A JP H0132661 B2 JPH0132661 B2 JP H0132661B2
Authority
JP
Japan
Prior art keywords
gate electrode
thin film
forming
gate
photosensitive resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56121114A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5821864A (ja
Inventor
Shinji Morozumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP56121114A priority Critical patent/JPS5821864A/ja
Publication of JPS5821864A publication Critical patent/JPS5821864A/ja
Publication of JPH0132661B2 publication Critical patent/JPH0132661B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
    • H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
    • H10H29/142—Two-dimensional arrangements, e.g. asymmetric LED layout

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP56121114A 1981-07-31 1981-07-31 薄膜半導体装置の製造方法 Granted JPS5821864A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56121114A JPS5821864A (ja) 1981-07-31 1981-07-31 薄膜半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56121114A JPS5821864A (ja) 1981-07-31 1981-07-31 薄膜半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5821864A JPS5821864A (ja) 1983-02-08
JPH0132661B2 true JPH0132661B2 (OSRAM) 1989-07-10

Family

ID=14803224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56121114A Granted JPS5821864A (ja) 1981-07-31 1981-07-31 薄膜半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5821864A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168278A (ja) * 1982-03-30 1983-10-04 Toshiba Corp 薄膜トランジスタの製造方法
JPS63272228A (ja) * 1987-04-30 1988-11-09 Sanyo Electric Co Ltd 時計付チユ−ナ
US5891815A (en) * 1988-12-21 1999-04-06 Lockheed Martin Corporation Silica, boron nitride, aluminum nitride, alumina composite, article and method of making same
US6721029B2 (en) * 1999-08-23 2004-04-13 Agilent Technologies, Inc. Electro-optical material-based display device

Also Published As

Publication number Publication date
JPS5821864A (ja) 1983-02-08

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