JPH0132360Y2 - - Google Patents

Info

Publication number
JPH0132360Y2
JPH0132360Y2 JP1983176540U JP17654083U JPH0132360Y2 JP H0132360 Y2 JPH0132360 Y2 JP H0132360Y2 JP 1983176540 U JP1983176540 U JP 1983176540U JP 17654083 U JP17654083 U JP 17654083U JP H0132360 Y2 JPH0132360 Y2 JP H0132360Y2
Authority
JP
Japan
Prior art keywords
spin chuck
temperature
spin
processing liquid
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983176540U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6083240U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17654083U priority Critical patent/JPS6083240U/ja
Publication of JPS6083240U publication Critical patent/JPS6083240U/ja
Application granted granted Critical
Publication of JPH0132360Y2 publication Critical patent/JPH0132360Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP17654083U 1983-11-15 1983-11-15 スピン現像機 Granted JPS6083240U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17654083U JPS6083240U (ja) 1983-11-15 1983-11-15 スピン現像機

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17654083U JPS6083240U (ja) 1983-11-15 1983-11-15 スピン現像機

Publications (2)

Publication Number Publication Date
JPS6083240U JPS6083240U (ja) 1985-06-08
JPH0132360Y2 true JPH0132360Y2 (enEXAMPLES) 1989-10-03

Family

ID=30383796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17654083U Granted JPS6083240U (ja) 1983-11-15 1983-11-15 スピン現像機

Country Status (1)

Country Link
JP (1) JPS6083240U (enEXAMPLES)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6178123A (ja) * 1984-09-26 1986-04-21 Dainippon Screen Mfg Co Ltd 基板の表面処理装置
JPH069184B2 (ja) * 1986-09-16 1994-02-02 ダイキン工業株式会社 レジスト現像方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5868749A (ja) * 1981-10-21 1983-04-23 Toshiba Corp レジスト現像装置
JPS58128441U (ja) * 1982-02-24 1983-08-31 富士通株式会社 現像装置

Also Published As

Publication number Publication date
JPS6083240U (ja) 1985-06-08

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