JPH0128683Y2 - - Google Patents
Info
- Publication number
- JPH0128683Y2 JPH0128683Y2 JP17708483U JP17708483U JPH0128683Y2 JP H0128683 Y2 JPH0128683 Y2 JP H0128683Y2 JP 17708483 U JP17708483 U JP 17708483U JP 17708483 U JP17708483 U JP 17708483U JP H0128683 Y2 JPH0128683 Y2 JP H0128683Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafer
- light
- thin piece
- thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 16
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000009434 installation Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 73
- 238000000034 method Methods 0.000 description 7
- 239000000758 substrate Substances 0.000 description 3
- 241001422033 Thestylus Species 0.000 description 2
- 238000010297 mechanical methods and process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Controlling Sheets Or Webs (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17708483U JPS6083245U (ja) | 1983-11-15 | 1983-11-15 | カセツト式薄片搬出入用薄片検知装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17708483U JPS6083245U (ja) | 1983-11-15 | 1983-11-15 | カセツト式薄片搬出入用薄片検知装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6083245U JPS6083245U (ja) | 1985-06-08 |
| JPH0128683Y2 true JPH0128683Y2 (enrdf_load_stackoverflow) | 1989-08-31 |
Family
ID=30384811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17708483U Granted JPS6083245U (ja) | 1983-11-15 | 1983-11-15 | カセツト式薄片搬出入用薄片検知装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6083245U (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6382248A (ja) * | 1986-09-26 | 1988-04-13 | Canon Inc | 薄板状物品の搬出または搬入装置 |
| DE4310149C2 (de) * | 1993-03-29 | 1996-05-02 | Jenoptik Jena Gmbh | Einrichtung zur Handhabung von scheibenförmigen Objekten in einer Handhabungsebene eines lokalen Reinraumes |
| JP6993631B2 (ja) * | 2017-04-21 | 2022-01-13 | 株式会社日本キャリア工業 | トレー検知機能を有する食品トレー搬送装置 |
-
1983
- 1983-11-15 JP JP17708483U patent/JPS6083245U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6083245U (ja) | 1985-06-08 |
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