JPH0128438Y2 - - Google Patents
Info
- Publication number
- JPH0128438Y2 JPH0128438Y2 JP12360282U JP12360282U JPH0128438Y2 JP H0128438 Y2 JPH0128438 Y2 JP H0128438Y2 JP 12360282 U JP12360282 U JP 12360282U JP 12360282 U JP12360282 U JP 12360282U JP H0128438 Y2 JPH0128438 Y2 JP H0128438Y2
- Authority
- JP
- Japan
- Prior art keywords
- test
- leak
- valve
- gas
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 description 31
- 239000001307 helium Substances 0.000 description 10
- 229910052734 helium Inorganic materials 0.000 description 10
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 10
- 238000001514 detection method Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004949 mass spectrometry Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12360282U JPS5927436U (ja) | 1982-08-13 | 1982-08-13 | 多連形リ−クテスト装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12360282U JPS5927436U (ja) | 1982-08-13 | 1982-08-13 | 多連形リ−クテスト装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5927436U JPS5927436U (ja) | 1984-02-20 |
| JPH0128438Y2 true JPH0128438Y2 (pl) | 1989-08-30 |
Family
ID=30282083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12360282U Granted JPS5927436U (ja) | 1982-08-13 | 1982-08-13 | 多連形リ−クテスト装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5927436U (pl) |
-
1982
- 1982-08-13 JP JP12360282U patent/JPS5927436U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5927436U (ja) | 1984-02-20 |
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