JPS5927436U - 多連形リ−クテスト装置 - Google Patents

多連形リ−クテスト装置

Info

Publication number
JPS5927436U
JPS5927436U JP12360282U JP12360282U JPS5927436U JP S5927436 U JPS5927436 U JP S5927436U JP 12360282 U JP12360282 U JP 12360282U JP 12360282 U JP12360282 U JP 12360282U JP S5927436 U JPS5927436 U JP S5927436U
Authority
JP
Japan
Prior art keywords
test
leak test
test device
vacuum
multiple type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12360282U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128438Y2 (pl
Inventor
一秀 足立
横山　佳興
川上　伸男
Original Assignee
株式会社島津製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社島津製作所 filed Critical 株式会社島津製作所
Priority to JP12360282U priority Critical patent/JPS5927436U/ja
Publication of JPS5927436U publication Critical patent/JPS5927436U/ja
Application granted granted Critical
Publication of JPH0128438Y2 publication Critical patent/JPH0128438Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP12360282U 1982-08-13 1982-08-13 多連形リ−クテスト装置 Granted JPS5927436U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12360282U JPS5927436U (ja) 1982-08-13 1982-08-13 多連形リ−クテスト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12360282U JPS5927436U (ja) 1982-08-13 1982-08-13 多連形リ−クテスト装置

Publications (2)

Publication Number Publication Date
JPS5927436U true JPS5927436U (ja) 1984-02-20
JPH0128438Y2 JPH0128438Y2 (pl) 1989-08-30

Family

ID=30282083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12360282U Granted JPS5927436U (ja) 1982-08-13 1982-08-13 多連形リ−クテスト装置

Country Status (1)

Country Link
JP (1) JPS5927436U (pl)

Also Published As

Publication number Publication date
JPH0128438Y2 (pl) 1989-08-30

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