JPH01282834A - ウェハ移載用の吸着ハンド - Google Patents

ウェハ移載用の吸着ハンド

Info

Publication number
JPH01282834A
JPH01282834A JP63112264A JP11226488A JPH01282834A JP H01282834 A JPH01282834 A JP H01282834A JP 63112264 A JP63112264 A JP 63112264A JP 11226488 A JP11226488 A JP 11226488A JP H01282834 A JPH01282834 A JP H01282834A
Authority
JP
Japan
Prior art keywords
suction
wafer
hand
suction plate
pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63112264A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0566021B2 (enExample
Inventor
Fujio Terai
藤雄 寺井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP63112264A priority Critical patent/JPH01282834A/ja
Publication of JPH01282834A publication Critical patent/JPH01282834A/ja
Publication of JPH0566021B2 publication Critical patent/JPH0566021B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP63112264A 1988-05-09 1988-05-09 ウェハ移載用の吸着ハンド Granted JPH01282834A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63112264A JPH01282834A (ja) 1988-05-09 1988-05-09 ウェハ移載用の吸着ハンド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63112264A JPH01282834A (ja) 1988-05-09 1988-05-09 ウェハ移載用の吸着ハンド

Publications (2)

Publication Number Publication Date
JPH01282834A true JPH01282834A (ja) 1989-11-14
JPH0566021B2 JPH0566021B2 (enExample) 1993-09-20

Family

ID=14582351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63112264A Granted JPH01282834A (ja) 1988-05-09 1988-05-09 ウェハ移載用の吸着ハンド

Country Status (1)

Country Link
JP (1) JPH01282834A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02291144A (ja) * 1989-05-01 1990-11-30 Nidek Co Ltd ウェーハ搬送装置
JPH04247638A (ja) * 1991-02-04 1992-09-03 Nippon Telegr & Teleph Corp <Ntt> 着脱移送装置
JP2007329506A (ja) * 2003-03-31 2007-12-20 Asml Netherlands Bv 支持構造体、リソグラフィ投影装置、およびデバイス製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02291144A (ja) * 1989-05-01 1990-11-30 Nidek Co Ltd ウェーハ搬送装置
JPH04247638A (ja) * 1991-02-04 1992-09-03 Nippon Telegr & Teleph Corp <Ntt> 着脱移送装置
JP2007329506A (ja) * 2003-03-31 2007-12-20 Asml Netherlands Bv 支持構造体、リソグラフィ投影装置、およびデバイス製造方法

Also Published As

Publication number Publication date
JPH0566021B2 (enExample) 1993-09-20

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