JPH0123138Y2 - - Google Patents
Info
- Publication number
- JPH0123138Y2 JPH0123138Y2 JP1985135241U JP13524185U JPH0123138Y2 JP H0123138 Y2 JPH0123138 Y2 JP H0123138Y2 JP 1985135241 U JP1985135241 U JP 1985135241U JP 13524185 U JP13524185 U JP 13524185U JP H0123138 Y2 JPH0123138 Y2 JP H0123138Y2
- Authority
- JP
- Japan
- Prior art keywords
- pellicle
- support frame
- adhesive layer
- flexible sheet
- blister
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012790 adhesive layer Substances 0.000 claims description 16
- 229920003023 plastic Polymers 0.000 claims description 6
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 239000000428 dust Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000004033 plastic Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Natural products C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985135241U JPH0123138Y2 (US07413550-20080819-C00001.png) | 1985-09-04 | 1985-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985135241U JPH0123138Y2 (US07413550-20080819-C00001.png) | 1985-09-04 | 1985-09-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6243359U JPS6243359U (US07413550-20080819-C00001.png) | 1987-03-16 |
| JPH0123138Y2 true JPH0123138Y2 (US07413550-20080819-C00001.png) | 1989-07-17 |
Family
ID=31037239
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985135241U Expired JPH0123138Y2 (US07413550-20080819-C00001.png) | 1985-09-04 | 1985-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0123138Y2 (US07413550-20080819-C00001.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0645965Y2 (ja) * | 1988-02-09 | 1994-11-24 | 三井石油化学工業株式会社 | ペリクル用容器 |
-
1985
- 1985-09-04 JP JP1985135241U patent/JPH0123138Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6243359U (US07413550-20080819-C00001.png) | 1987-03-16 |
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