JPH0122813B2 - - Google Patents

Info

Publication number
JPH0122813B2
JPH0122813B2 JP60001714A JP171485A JPH0122813B2 JP H0122813 B2 JPH0122813 B2 JP H0122813B2 JP 60001714 A JP60001714 A JP 60001714A JP 171485 A JP171485 A JP 171485A JP H0122813 B2 JPH0122813 B2 JP H0122813B2
Authority
JP
Japan
Prior art keywords
plasma
reaction
raw material
stage
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60001714A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61161138A (ja
Inventor
Kazutomo Kijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO
Original Assignee
KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO filed Critical KAGAKU GIJUTSUCHO MUKIZAISHITSU KENKYUSHOCHO
Priority to JP60001714A priority Critical patent/JPS61161138A/ja
Publication of JPS61161138A publication Critical patent/JPS61161138A/ja
Publication of JPH0122813B2 publication Critical patent/JPH0122813B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B01J12/002—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor carried out in the plasma state

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Carbon And Carbon Compounds (AREA)
JP60001714A 1985-01-09 1985-01-09 プラズマ利用化学反応装置 Granted JPS61161138A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60001714A JPS61161138A (ja) 1985-01-09 1985-01-09 プラズマ利用化学反応装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60001714A JPS61161138A (ja) 1985-01-09 1985-01-09 プラズマ利用化学反応装置

Publications (2)

Publication Number Publication Date
JPS61161138A JPS61161138A (ja) 1986-07-21
JPH0122813B2 true JPH0122813B2 (de) 1989-04-27

Family

ID=11509224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60001714A Granted JPS61161138A (ja) 1985-01-09 1985-01-09 プラズマ利用化学反応装置

Country Status (1)

Country Link
JP (1) JPS61161138A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6358799A (ja) * 1986-08-28 1988-03-14 日本高周波株式会社 反応試料噴出部をプラズマ・フレ−ム中に挿入した高周波プラズマ反応装置
JPS63158799A (ja) * 1986-12-22 1988-07-01 日本高周波株式会社 多段無電極高周波プラズマ反応装置
WO2005039752A1 (en) * 2003-10-15 2005-05-06 Dow Corning Ireland Limited Manufacture of resins
AU2006259381B2 (en) * 2005-06-17 2012-01-19 Perkinelmer Health Sciences, Inc. Boost devices and methods of using them
AU2011248179B2 (en) 2010-05-05 2014-10-02 Perkinelmer U.S. Llc Inductive devices and low flow plasmas using them
AU2011248185B2 (en) 2010-05-05 2014-10-16 Perkinelmer U.S. Llc Oxidation resistant induction devices
CN108557823A (zh) * 2018-06-27 2018-09-21 江苏大学 一种超纯纳米碳化硅及其制备方法

Also Published As

Publication number Publication date
JPS61161138A (ja) 1986-07-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term