JPH0121883B2 - - Google Patents

Info

Publication number
JPH0121883B2
JPH0121883B2 JP55154202A JP15420280A JPH0121883B2 JP H0121883 B2 JPH0121883 B2 JP H0121883B2 JP 55154202 A JP55154202 A JP 55154202A JP 15420280 A JP15420280 A JP 15420280A JP H0121883 B2 JPH0121883 B2 JP H0121883B2
Authority
JP
Japan
Prior art keywords
signal
inspected
scan
normal surface
flaw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55154202A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5777907A (en
Inventor
Kenji Shiroshita
Hiroshi Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15420280A priority Critical patent/JPS5777907A/ja
Publication of JPS5777907A publication Critical patent/JPS5777907A/ja
Publication of JPH0121883B2 publication Critical patent/JPH0121883B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/28—Measuring arrangements characterised by the use of optical techniques for measuring areas
    • G01B11/285—Measuring arrangements characterised by the use of optical techniques for measuring areas using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP15420280A 1980-10-31 1980-10-31 Surface flaw detector Granted JPS5777907A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15420280A JPS5777907A (en) 1980-10-31 1980-10-31 Surface flaw detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15420280A JPS5777907A (en) 1980-10-31 1980-10-31 Surface flaw detector

Publications (2)

Publication Number Publication Date
JPS5777907A JPS5777907A (en) 1982-05-15
JPH0121883B2 true JPH0121883B2 (enrdf_load_stackoverflow) 1989-04-24

Family

ID=15579067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15420280A Granted JPS5777907A (en) 1980-10-31 1980-10-31 Surface flaw detector

Country Status (1)

Country Link
JP (1) JPS5777907A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01143945A (ja) * 1987-11-30 1989-06-06 Fuji Photo Film Co Ltd テープ欠陥検出方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026973B2 (ja) * 1976-12-24 1985-06-26 株式会社日立製作所 物体の表面検査方法及びその装置

Also Published As

Publication number Publication date
JPS5777907A (en) 1982-05-15

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