JPH0121559Y2 - - Google Patents

Info

Publication number
JPH0121559Y2
JPH0121559Y2 JP11986585U JP11986585U JPH0121559Y2 JP H0121559 Y2 JPH0121559 Y2 JP H0121559Y2 JP 11986585 U JP11986585 U JP 11986585U JP 11986585 U JP11986585 U JP 11986585U JP H0121559 Y2 JPH0121559 Y2 JP H0121559Y2
Authority
JP
Japan
Prior art keywords
light
shielding plate
light shielding
lamp
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11986585U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228429U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11986585U priority Critical patent/JPH0121559Y2/ja
Publication of JPS6228429U publication Critical patent/JPS6228429U/ja
Application granted granted Critical
Publication of JPH0121559Y2 publication Critical patent/JPH0121559Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
JP11986585U 1985-08-06 1985-08-06 Expired JPH0121559Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11986585U JPH0121559Y2 (OSRAM) 1985-08-06 1985-08-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11986585U JPH0121559Y2 (OSRAM) 1985-08-06 1985-08-06

Publications (2)

Publication Number Publication Date
JPS6228429U JPS6228429U (OSRAM) 1987-02-20
JPH0121559Y2 true JPH0121559Y2 (OSRAM) 1989-06-27

Family

ID=31007641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11986585U Expired JPH0121559Y2 (OSRAM) 1985-08-06 1985-08-06

Country Status (1)

Country Link
JP (1) JPH0121559Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3641320B2 (ja) * 1996-05-28 2005-04-20 サンエー技研株式会社 露光装置に用いられるシャッター装置

Also Published As

Publication number Publication date
JPS6228429U (OSRAM) 1987-02-20

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