JPH0121527B2 - - Google Patents
Info
- Publication number
- JPH0121527B2 JPH0121527B2 JP10602779A JP10602779A JPH0121527B2 JP H0121527 B2 JPH0121527 B2 JP H0121527B2 JP 10602779 A JP10602779 A JP 10602779A JP 10602779 A JP10602779 A JP 10602779A JP H0121527 B2 JPH0121527 B2 JP H0121527B2
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- magnetization
- film
- recording medium
- mmhg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004544 sputter deposition Methods 0.000 claims description 46
- 238000000034 method Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 239000011261 inert gas Substances 0.000 claims description 8
- 230000005415 magnetization Effects 0.000 description 40
- 239000010408 film Substances 0.000 description 35
- 239000010409 thin film Substances 0.000 description 17
- 239000007789 gas Substances 0.000 description 5
- 229910000599 Cr alloy Inorganic materials 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10602779A JPS5634147A (en) | 1979-08-22 | 1979-08-22 | Manufacture of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10602779A JPS5634147A (en) | 1979-08-22 | 1979-08-22 | Manufacture of magnetic recording medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5634147A JPS5634147A (en) | 1981-04-06 |
| JPH0121527B2 true JPH0121527B2 (enrdf_load_stackoverflow) | 1989-04-21 |
Family
ID=14423149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10602779A Granted JPS5634147A (en) | 1979-08-22 | 1979-08-22 | Manufacture of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5634147A (enrdf_load_stackoverflow) |
-
1979
- 1979-08-22 JP JP10602779A patent/JPS5634147A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5634147A (en) | 1981-04-06 |
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