JPH0119803Y2 - - Google Patents

Info

Publication number
JPH0119803Y2
JPH0119803Y2 JP16290183U JP16290183U JPH0119803Y2 JP H0119803 Y2 JPH0119803 Y2 JP H0119803Y2 JP 16290183 U JP16290183 U JP 16290183U JP 16290183 U JP16290183 U JP 16290183U JP H0119803 Y2 JPH0119803 Y2 JP H0119803Y2
Authority
JP
Japan
Prior art keywords
electron beam
aperture
lens
energy
fluorescent plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16290183U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6071064U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16290183U priority Critical patent/JPS6071064U/ja
Publication of JPS6071064U publication Critical patent/JPS6071064U/ja
Application granted granted Critical
Publication of JPH0119803Y2 publication Critical patent/JPH0119803Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
JP16290183U 1983-10-21 1983-10-21 分析電子顕微鏡 Granted JPS6071064U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16290183U JPS6071064U (ja) 1983-10-21 1983-10-21 分析電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16290183U JPS6071064U (ja) 1983-10-21 1983-10-21 分析電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS6071064U JPS6071064U (ja) 1985-05-20
JPH0119803Y2 true JPH0119803Y2 (pm) 1989-06-07

Family

ID=30357594

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16290183U Granted JPS6071064U (ja) 1983-10-21 1983-10-21 分析電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS6071064U (pm)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8609740D0 (en) * 1986-04-22 1986-05-29 Spectros Ltd Charged particle energy analyser

Also Published As

Publication number Publication date
JPS6071064U (ja) 1985-05-20

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