JPH0119803Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an improvement in an analytical electron microscope that simultaneously displays an electron microscope image and the energy in the image.

As a conventional analytical electron microscope, an apparatus as shown in FIG. 1 is used. 1 in FIG. 1 indicates a mirror body of an electron microscope. 2 is an energy analyzer that analyzes the energy of an electron beam that has passed through a sample (not shown), and the analyzer 2 is connected to a scanning power source 3.
is swept by. 4 is energy analyzer 2
It is a detector for detecting the output signal of
The output signal from the detector 4 is input to a vertical deflection coil of a CRT 5 which is horizontally scanned by a scanning power supply 3 and displayed as an energy spectrum.
6 is a projection lens of a lens system consisting of an objective lens, an intermediate lens, and a projection lens, and 7 is a fluorescent plate whose surface is coated with a fluorescent substance. 8 is a fluorescent plate 7
The entrance diaphragm 8 is located below the entrance diaphragm 8, and the energy analyzer 2 as shown in FIG.
A circular electron beam passage hole 8 that restricts the incidence of the electron beam to
A is pierced. 9 is energy analyzer 2
This is a detection slit placed between the detector 4 and the detector 4.

In the conventional device configured in this way, the fluorescent plate 7
The electron beam focused on the top is observed with a fluorescent plate 7, and the sample is moved so that the field of view requiring energy analysis is placed on a small circular or rectangular fluorescent plate 7' that forms the center of the fluorescent plate 7. conduct. After that, the small fluorescent screen 7'
is opened to guide the electron beam to the energy analyzer 2, and its energy is analyzed. That is, the entrance aperture 8 not only limits the aperture angle of the incident electron beam, but also plays the role of selecting the field of view for analysis by the energy analyzer 2. However, the apparatus constructed in this manner has a drawback in that the small phosphor plate 7' and the entrance aperture 8 do not match in shape, making it impossible to accurately determine the analytical field of view incident on the energy analyzer. Furthermore, since the electron beam passage hole 8a of the entrance aperture 8 is circular, it is not possible to efficiently take in electrons from a rectangular or triangular analysis region such as a precipitate or a ceramic grain boundary.

The present invention was devised in view of the above points, and is an apparatus configured to guide an electron beam transmitted through a sample to an energy analyzer provided below a fluorescent plate through an objective lens, an intermediate lens, and a projection lens. The present invention is characterized in that an entrance aperture for restricting the electron beam incident on the energy analyzer is disposed between the phosphor plate and the projection lens.

An embodiment of the present invention will be described below with reference to the accompanying drawings.

FIG. 3 shows a schematic configuration of an embodiment of the device of the present invention, and FIG. 4 shows an enlarged view of the entrance diaphragm used in the embodiment of the device shown in FIG. 3 from the direction of the incident electron beam. . Components that are the same as those in FIG. 1 are given the same numbers and their explanations will be omitted. The device of this embodiment differs from the device shown in FIG. 1 in that the entrance diaphragm 10 is disposed between the projection lens 6 and the fluorescent plate 7, and as shown in FIG. Forming multiple electron beam passage holes with different hole shapes,
The structure is such that holes with different shapes can be set at predetermined positions on the electron beam optical axis by moving the base. The shape of the aperture hole is 1
Rectangles, triangles, and quadrilaterals such as 0a, 10b, and 10c are selected, respectively. With this configuration, it is possible to observe the field image passing through the aperture 10, for example, the passage hole 10a, with the small fluorescent screen 7' closed, so that this field of view and the image of the sample to be analyzed can be matched. Adjust the sample position and image magnification. In this way, the small fluorescent screen 7'
Even if analysis is performed with the device open, energy analysis can be performed by accurately matching the field of view selected by image observation with the field of analysis incident on the energy analyzer 2. Furthermore, by moving and adjusting the entrance aperture 10, the shape of the electron beam passage hole can be changed to a shape other than circular, and even samples with special shapes such as precipitates can be efficiently analyzed.

It should be noted that the present invention is not limited to the above embodiments, and in this embodiment, the hole shape of the aperture 10 can be selected, but the hole shape of the aperture 10 can be changed each time depending on the sample to be analyzed. Similar effects can be obtained with other configurations.

As described above, in the present invention, since the entrance aperture is located between the objective lens and the fluorescent plate, accurate selection of the analysis field can be performed on the fluorescent plate.

[Brief explanation of the drawing]

Figure 1 is a schematic configuration diagram of the conventional device, and Figure 2 is the
FIG. 3 is a schematic configuration diagram of an apparatus according to an embodiment of the present invention, and FIG. 4 is a diagram showing an example of an entrance diaphragm of an embodiment of the apparatus. 1: Mirror body, 2: Energy analyzer, 3: Scanning power supply, 4: Detector, 5: CRT, 6: Projection lens, 7: Fluorescent plate, 8, 10: Incidence aperture, 9: Detection slit.

Claims (1)

[Claims for Utility Model Registration] (1) In an apparatus configured to guide an electron beam transmitted through a sample to an energy analyzer provided below a fluorescent plate by an objective lens, an intermediate lens, and a projection lens, An analytical electron microscope characterized in that an entrance aperture for restricting the electron beam incident on the analyzer is disposed between the phosphor plate and the projection lens. (2) The analytical electron microscope according to claim 1, wherein the injection aperture is configured so that a plurality of aperture holes having different hole shapes can be selected.