JPH0119448B2 - - Google Patents
Info
- Publication number
- JPH0119448B2 JPH0119448B2 JP60271144A JP27114485A JPH0119448B2 JP H0119448 B2 JPH0119448 B2 JP H0119448B2 JP 60271144 A JP60271144 A JP 60271144A JP 27114485 A JP27114485 A JP 27114485A JP H0119448 B2 JPH0119448 B2 JP H0119448B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- rare earth
- iron group
- temperature
- molded body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052751 metal Inorganic materials 0.000 claims description 61
- 239000002184 metal Substances 0.000 claims description 61
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 53
- 239000013077 target material Substances 0.000 claims description 44
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 43
- 150000002910 rare earth metals Chemical class 0.000 claims description 43
- 239000000203 mixture Substances 0.000 claims description 38
- 238000010438 heat treatment Methods 0.000 claims description 27
- 229910045601 alloy Inorganic materials 0.000 claims description 22
- 239000000956 alloy Substances 0.000 claims description 22
- 229910000765 intermetallic Inorganic materials 0.000 claims description 17
- -1 iron group metals Chemical class 0.000 claims description 17
- 239000007791 liquid phase Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 16
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 229910052771 Terbium Inorganic materials 0.000 claims description 9
- 229910052742 iron Inorganic materials 0.000 claims description 9
- 238000010894 electron beam technology Methods 0.000 claims description 8
- 238000007731 hot pressing Methods 0.000 claims description 7
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 6
- 239000011261 inert gas Substances 0.000 claims description 6
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 5
- 229910052691 Erbium Inorganic materials 0.000 claims description 5
- 229910052689 Holmium Inorganic materials 0.000 claims description 5
- 229910052775 Thulium Inorganic materials 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 238000005096 rolling process Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000009461 vacuum packaging Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 description 27
- 239000010408 film Substances 0.000 description 26
- 229910052760 oxygen Inorganic materials 0.000 description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 14
- 239000001301 oxygen Substances 0.000 description 14
- 239000002245 particle Substances 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 239000011812 mixed powder Substances 0.000 description 8
- 239000000843 powder Substances 0.000 description 8
- 239000010935 stainless steel Substances 0.000 description 8
- 229910001220 stainless steel Inorganic materials 0.000 description 8
- 239000007789 gas Substances 0.000 description 7
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 230000005496 eutectics Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 238000002156 mixing Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000227 grinding Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910017061 Fe Co Inorganic materials 0.000 description 2
- 229910000640 Fe alloy Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000005098 hot rolling Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000001000 micrograph Methods 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000012733 comparative method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000280 densification Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005242 forging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Thin Magnetic Films (AREA)
- Powder Metallurgy (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60271144A JPS62130235A (ja) | 1985-12-02 | 1985-12-02 | タ−ゲツト材の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60271144A JPS62130235A (ja) | 1985-12-02 | 1985-12-02 | タ−ゲツト材の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62130235A JPS62130235A (ja) | 1987-06-12 |
| JPH0119448B2 true JPH0119448B2 (sv) | 1989-04-11 |
Family
ID=17495932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60271144A Granted JPS62130235A (ja) | 1985-12-02 | 1985-12-02 | タ−ゲツト材の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62130235A (sv) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02130650U (sv) * | 1989-03-31 | 1990-10-29 | ||
| JPH02149251U (sv) * | 1989-05-17 | 1990-12-19 | ||
| JPH0313153U (sv) * | 1989-06-22 | 1991-02-08 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0768611B2 (ja) * | 1986-08-20 | 1995-07-26 | 日立金属株式会社 | スパツタリング用合金タ−ゲツトの製造方法 |
| JPS6431966A (en) * | 1987-07-25 | 1989-02-02 | Tokin Corp | Alloy target material and its production |
| JP2692139B2 (ja) * | 1988-05-27 | 1997-12-17 | セイコーエプソン株式会社 | スパッタリングターゲットの製造方法 |
| JPH079060B2 (ja) * | 1988-02-25 | 1995-02-01 | 株式会社トーキン | 光磁気記録媒体用ターゲットの製造方法 |
-
1985
- 1985-12-02 JP JP60271144A patent/JPS62130235A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02130650U (sv) * | 1989-03-31 | 1990-10-29 | ||
| JPH02149251U (sv) * | 1989-05-17 | 1990-12-19 | ||
| JPH0313153U (sv) * | 1989-06-22 | 1991-02-08 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62130235A (ja) | 1987-06-12 |
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