JPH01180978A - 真空処理装置 - Google Patents

真空処理装置

Info

Publication number
JPH01180978A
JPH01180978A JP216488A JP216488A JPH01180978A JP H01180978 A JPH01180978 A JP H01180978A JP 216488 A JP216488 A JP 216488A JP 216488 A JP216488 A JP 216488A JP H01180978 A JPH01180978 A JP H01180978A
Authority
JP
Japan
Prior art keywords
chamber
turntable
load
inlet
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP216488A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0576544B2 (enrdf_load_stackoverflow
Inventor
Masahiko Tanaka
雅彦 田中
Hideo Takagi
高木　秀雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP216488A priority Critical patent/JPH01180978A/ja
Publication of JPH01180978A publication Critical patent/JPH01180978A/ja
Publication of JPH0576544B2 publication Critical patent/JPH0576544B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP216488A 1988-01-08 1988-01-08 真空処理装置 Granted JPH01180978A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP216488A JPH01180978A (ja) 1988-01-08 1988-01-08 真空処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP216488A JPH01180978A (ja) 1988-01-08 1988-01-08 真空処理装置

Publications (2)

Publication Number Publication Date
JPH01180978A true JPH01180978A (ja) 1989-07-18
JPH0576544B2 JPH0576544B2 (enrdf_load_stackoverflow) 1993-10-22

Family

ID=11521721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP216488A Granted JPH01180978A (ja) 1988-01-08 1988-01-08 真空処理装置

Country Status (1)

Country Link
JP (1) JPH01180978A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0576544B2 (enrdf_load_stackoverflow) 1993-10-22

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