JPH0116790B2 - - Google Patents

Info

Publication number
JPH0116790B2
JPH0116790B2 JP56161540A JP16154081A JPH0116790B2 JP H0116790 B2 JPH0116790 B2 JP H0116790B2 JP 56161540 A JP56161540 A JP 56161540A JP 16154081 A JP16154081 A JP 16154081A JP H0116790 B2 JPH0116790 B2 JP H0116790B2
Authority
JP
Japan
Prior art keywords
silicon
silicon carbide
sintered body
metal
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56161540A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5864284A (ja
Inventor
Shigeru Takahata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP56161540A priority Critical patent/JPS5864284A/ja
Publication of JPS5864284A publication Critical patent/JPS5864284A/ja
Publication of JPH0116790B2 publication Critical patent/JPH0116790B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
JP56161540A 1981-10-09 1981-10-09 炭化けい素焼結体の製造方法 Granted JPS5864284A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56161540A JPS5864284A (ja) 1981-10-09 1981-10-09 炭化けい素焼結体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56161540A JPS5864284A (ja) 1981-10-09 1981-10-09 炭化けい素焼結体の製造方法

Publications (2)

Publication Number Publication Date
JPS5864284A JPS5864284A (ja) 1983-04-16
JPH0116790B2 true JPH0116790B2 (enExample) 1989-03-27

Family

ID=15737035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56161540A Granted JPS5864284A (ja) 1981-10-09 1981-10-09 炭化けい素焼結体の製造方法

Country Status (1)

Country Link
JP (1) JPS5864284A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61197483A (ja) * 1985-02-27 1986-09-01 株式会社リケン セラミックス摺動部材の製造方法
JPS61295289A (ja) * 1985-06-20 1986-12-26 バブコツク日立株式会社 炭化珪素焼結体およびその製造法
JPH0770494B2 (ja) * 1986-10-15 1995-07-31 東海高熱工業株式会社 半導体製造用ウエハ−ボ−トの製法

Also Published As

Publication number Publication date
JPS5864284A (ja) 1983-04-16

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