JPH01158622A - 連続磁性媒体の製造方法 - Google Patents
連続磁性媒体の製造方法Info
- Publication number
- JPH01158622A JPH01158622A JP31522387A JP31522387A JPH01158622A JP H01158622 A JPH01158622 A JP H01158622A JP 31522387 A JP31522387 A JP 31522387A JP 31522387 A JP31522387 A JP 31522387A JP H01158622 A JPH01158622 A JP H01158622A
- Authority
- JP
- Japan
- Prior art keywords
- continuous magnetic
- ions
- continuous
- layer
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 32
- 239000010409 thin film Substances 0.000 claims abstract description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 24
- 239000000463 material Substances 0.000 claims abstract description 23
- 229910052786 argon Inorganic materials 0.000 claims abstract description 22
- -1 fluorine ions Chemical class 0.000 claims abstract description 22
- 229910052731 fluorine Inorganic materials 0.000 claims abstract description 14
- 239000011737 fluorine Substances 0.000 claims abstract description 14
- 238000004544 sputter deposition Methods 0.000 claims abstract description 12
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000010410 layer Substances 0.000 claims description 50
- 239000011241 protective layer Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 239000000696 magnetic material Substances 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 abstract description 11
- 239000010408 film Substances 0.000 abstract description 9
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 abstract description 4
- 239000004642 Polyimide Substances 0.000 abstract description 2
- 239000012300 argon atmosphere Substances 0.000 abstract description 2
- 229920001721 polyimide Polymers 0.000 abstract description 2
- 230000001681 protective effect Effects 0.000 abstract 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 abstract 1
- 239000010952 cobalt-chrome Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 9
- 239000000758 substrate Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000314 lubricant Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000012298 atmosphere Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003682 fluorination reaction Methods 0.000 description 2
- 230000005389 magnetism Effects 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31522387A JPH01158622A (ja) | 1987-12-15 | 1987-12-15 | 連続磁性媒体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31522387A JPH01158622A (ja) | 1987-12-15 | 1987-12-15 | 連続磁性媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01158622A true JPH01158622A (ja) | 1989-06-21 |
| JPH043009B2 JPH043009B2 (enrdf_load_stackoverflow) | 1992-01-21 |
Family
ID=18062879
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31522387A Granted JPH01158622A (ja) | 1987-12-15 | 1987-12-15 | 連続磁性媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01158622A (enrdf_load_stackoverflow) |
-
1987
- 1987-12-15 JP JP31522387A patent/JPH01158622A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH043009B2 (enrdf_load_stackoverflow) | 1992-01-21 |
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