JPH01158302A - オートフオーカス機構付光学測定機 - Google Patents
オートフオーカス機構付光学測定機Info
- Publication number
- JPH01158302A JPH01158302A JP31798587A JP31798587A JPH01158302A JP H01158302 A JPH01158302 A JP H01158302A JP 31798587 A JP31798587 A JP 31798587A JP 31798587 A JP31798587 A JP 31798587A JP H01158302 A JPH01158302 A JP H01158302A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- focus
- measured
- image
- pattern filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 34
- 230000007246 mechanism Effects 0.000 title claims description 16
- 238000005286 illumination Methods 0.000 claims description 19
- 238000003384 imaging method Methods 0.000 claims description 17
- 238000005259 measurement Methods 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 11
- 230000008859 change Effects 0.000 claims description 9
- 230000004044 response Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 7
- 238000003708 edge detection Methods 0.000 description 7
- 239000011521 glass Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 230000005284 excitation Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 210000003323 beak Anatomy 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001934 delay Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
- Automatic Focus Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31798587A JPH01158302A (ja) | 1987-12-16 | 1987-12-16 | オートフオーカス機構付光学測定機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31798587A JPH01158302A (ja) | 1987-12-16 | 1987-12-16 | オートフオーカス機構付光学測定機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01158302A true JPH01158302A (ja) | 1989-06-21 |
| JPH0585002B2 JPH0585002B2 (enrdf_load_stackoverflow) | 1993-12-06 |
Family
ID=18094196
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31798587A Granted JPH01158302A (ja) | 1987-12-16 | 1987-12-16 | オートフオーカス機構付光学測定機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01158302A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10185531A (ja) * | 1996-10-23 | 1998-07-14 | Nec Corp | 高精度パターンの外観の検査方法および装置 |
| JP2012194085A (ja) * | 2011-03-17 | 2012-10-11 | Mitsubishi Electric Corp | エッジ検出装置 |
| CN104990497A (zh) * | 2015-06-15 | 2015-10-21 | 上海交通大学 | 无刀口后焦偏置的偏心光束法主动离焦量探测装置及方法 |
| CN110530291A (zh) * | 2019-08-26 | 2019-12-03 | 珠海博明视觉科技有限公司 | 一种光栅投影法高度重建的自动对焦算法 |
-
1987
- 1987-12-16 JP JP31798587A patent/JPH01158302A/ja active Granted
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10185531A (ja) * | 1996-10-23 | 1998-07-14 | Nec Corp | 高精度パターンの外観の検査方法および装置 |
| JP2012194085A (ja) * | 2011-03-17 | 2012-10-11 | Mitsubishi Electric Corp | エッジ検出装置 |
| CN104990497A (zh) * | 2015-06-15 | 2015-10-21 | 上海交通大学 | 无刀口后焦偏置的偏心光束法主动离焦量探测装置及方法 |
| CN104990497B (zh) * | 2015-06-15 | 2017-11-14 | 上海交通大学 | 无刀口后焦偏置的偏心光束法主动离焦量探测装置及方法 |
| CN110530291A (zh) * | 2019-08-26 | 2019-12-03 | 珠海博明视觉科技有限公司 | 一种光栅投影法高度重建的自动对焦算法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0585002B2 (enrdf_load_stackoverflow) | 1993-12-06 |
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