JPH0115017B2 - - Google Patents

Info

Publication number
JPH0115017B2
JPH0115017B2 JP56038229A JP3822981A JPH0115017B2 JP H0115017 B2 JPH0115017 B2 JP H0115017B2 JP 56038229 A JP56038229 A JP 56038229A JP 3822981 A JP3822981 A JP 3822981A JP H0115017 B2 JPH0115017 B2 JP H0115017B2
Authority
JP
Japan
Prior art keywords
layer
capacitance
sensor element
oxide film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56038229A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57153254A (en
Inventor
Teruyoshi Mihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP3822981A priority Critical patent/JPS57153254A/ja
Publication of JPS57153254A publication Critical patent/JPS57153254A/ja
Publication of JPH0115017B2 publication Critical patent/JPH0115017B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP3822981A 1981-03-17 1981-03-17 Electrostatic capacity sensor Granted JPS57153254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3822981A JPS57153254A (en) 1981-03-17 1981-03-17 Electrostatic capacity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3822981A JPS57153254A (en) 1981-03-17 1981-03-17 Electrostatic capacity sensor

Publications (2)

Publication Number Publication Date
JPS57153254A JPS57153254A (en) 1982-09-21
JPH0115017B2 true JPH0115017B2 (enrdf_load_stackoverflow) 1989-03-15

Family

ID=12519471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3822981A Granted JPS57153254A (en) 1981-03-17 1981-03-17 Electrostatic capacity sensor

Country Status (1)

Country Link
JP (1) JPS57153254A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3310643C2 (de) * 1983-03-24 1986-04-10 Karlheinz Dr. 7801 Schallstadt Ziegler Drucksensor
JP2002243689A (ja) * 2001-02-15 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法
JP2002243690A (ja) * 2001-02-20 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法
JP2003004683A (ja) * 2001-06-15 2003-01-08 Denso Corp 容量式湿度センサ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57148242A (en) * 1981-03-09 1982-09-13 Nissan Motor Co Ltd Electrostatic capacity sensor

Also Published As

Publication number Publication date
JPS57153254A (en) 1982-09-21

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