JPS57153254A - Electrostatic capacity sensor - Google Patents
Electrostatic capacity sensorInfo
- Publication number
- JPS57153254A JPS57153254A JP3822981A JP3822981A JPS57153254A JP S57153254 A JPS57153254 A JP S57153254A JP 3822981 A JP3822981 A JP 3822981A JP 3822981 A JP3822981 A JP 3822981A JP S57153254 A JPS57153254 A JP S57153254A
- Authority
- JP
- Japan
- Prior art keywords
- counter electrodes
- sensor
- electrostatic capacity
- electrodes
- low resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 abstract 3
- 238000005530 etching Methods 0.000 abstract 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/226—Construction of measuring vessels; Electrodes therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3822981A JPS57153254A (en) | 1981-03-17 | 1981-03-17 | Electrostatic capacity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3822981A JPS57153254A (en) | 1981-03-17 | 1981-03-17 | Electrostatic capacity sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57153254A true JPS57153254A (en) | 1982-09-21 |
JPH0115017B2 JPH0115017B2 (enrdf_load_stackoverflow) | 1989-03-15 |
Family
ID=12519471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3822981A Granted JPS57153254A (en) | 1981-03-17 | 1981-03-17 | Electrostatic capacity sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57153254A (enrdf_load_stackoverflow) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60501177A (ja) * | 1983-03-24 | 1985-07-25 | ツィ−グラ−、カ−ルハインツ | 圧力センサ |
FR2821160A1 (fr) * | 2001-02-20 | 2002-08-23 | Denso Corp | Capteur d'humidite du type capacitif, et procede de fabrication dudit capteur |
JP2002243689A (ja) * | 2001-02-15 | 2002-08-28 | Denso Corp | 容量式湿度センサおよびその製造方法 |
JP2003004683A (ja) * | 2001-06-15 | 2003-01-08 | Denso Corp | 容量式湿度センサ |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57148242A (en) * | 1981-03-09 | 1982-09-13 | Nissan Motor Co Ltd | Electrostatic capacity sensor |
-
1981
- 1981-03-17 JP JP3822981A patent/JPS57153254A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57148242A (en) * | 1981-03-09 | 1982-09-13 | Nissan Motor Co Ltd | Electrostatic capacity sensor |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60501177A (ja) * | 1983-03-24 | 1985-07-25 | ツィ−グラ−、カ−ルハインツ | 圧力センサ |
JP2002243689A (ja) * | 2001-02-15 | 2002-08-28 | Denso Corp | 容量式湿度センサおよびその製造方法 |
FR2821160A1 (fr) * | 2001-02-20 | 2002-08-23 | Denso Corp | Capteur d'humidite du type capacitif, et procede de fabrication dudit capteur |
JP2003004683A (ja) * | 2001-06-15 | 2003-01-08 | Denso Corp | 容量式湿度センサ |
Also Published As
Publication number | Publication date |
---|---|
JPH0115017B2 (enrdf_load_stackoverflow) | 1989-03-15 |
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