JPS57153254A - Electrostatic capacity sensor - Google Patents

Electrostatic capacity sensor

Info

Publication number
JPS57153254A
JPS57153254A JP3822981A JP3822981A JPS57153254A JP S57153254 A JPS57153254 A JP S57153254A JP 3822981 A JP3822981 A JP 3822981A JP 3822981 A JP3822981 A JP 3822981A JP S57153254 A JPS57153254 A JP S57153254A
Authority
JP
Japan
Prior art keywords
counter electrodes
sensor
electrostatic capacity
electrodes
low resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3822981A
Other languages
Japanese (ja)
Other versions
JPH0115017B2 (en
Inventor
Teruyoshi Mihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP3822981A priority Critical patent/JPS57153254A/en
Publication of JPS57153254A publication Critical patent/JPS57153254A/en
Publication of JPH0115017B2 publication Critical patent/JPH0115017B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

PURPOSE:To obtain an electrostatic capacity sensor with the leak current between counter electrodes reduced, by separating a semiconductor substrate and counter electrodes from each other by an insulating film. CONSTITUTION:An oxide film 8 is formed on the surface of a poly crystalline silicon substrate 7, and counter electrodes 9 and 10 consisting of P type single crystal silicon having surface bearing (100) are arranged at constant intervals. These counter electrodes 9 and 10 are separated from each other with air layers by anisotropic etching, and an oxide film 11 is formed on the etching face. Low resistance layers 12 of high density regions are formed on the top surface of counter electrodes 9 and 10, and these low resistance layers 12 are used as connection parts to connect aluminium electrodes 13 and 14 to counter electrodes 9 and 10. Since counter electrodes 9 and 10 are insulated and separated by the insulating film 8 and the poly crystalline silicon substrate 7, the leak current between counter electrodes is reduced, and this sensor is strong against humidity and dirt and detects stably an electrostatic capacity even if the sensor is put in a high temperature medium.
JP3822981A 1981-03-17 1981-03-17 Electrostatic capacity sensor Granted JPS57153254A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3822981A JPS57153254A (en) 1981-03-17 1981-03-17 Electrostatic capacity sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3822981A JPS57153254A (en) 1981-03-17 1981-03-17 Electrostatic capacity sensor

Publications (2)

Publication Number Publication Date
JPS57153254A true JPS57153254A (en) 1982-09-21
JPH0115017B2 JPH0115017B2 (en) 1989-03-15

Family

ID=12519471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3822981A Granted JPS57153254A (en) 1981-03-17 1981-03-17 Electrostatic capacity sensor

Country Status (1)

Country Link
JP (1) JPS57153254A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60501177A (en) * 1983-03-24 1985-07-25 ツィ−グラ−、カ−ルハインツ pressure sensor
FR2821160A1 (en) * 2001-02-20 2002-08-23 Denso Corp CAPACITIVE TYPE MOISTURE SENSOR, AND METHOD FOR MANUFACTURING SAME
JP2002243689A (en) * 2001-02-15 2002-08-28 Denso Corp Capacity-type humidity sensor and method for manufacturing the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57148242A (en) * 1981-03-09 1982-09-13 Nissan Motor Co Ltd Electrostatic capacity sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57148242A (en) * 1981-03-09 1982-09-13 Nissan Motor Co Ltd Electrostatic capacity sensor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60501177A (en) * 1983-03-24 1985-07-25 ツィ−グラ−、カ−ルハインツ pressure sensor
JP2002243689A (en) * 2001-02-15 2002-08-28 Denso Corp Capacity-type humidity sensor and method for manufacturing the same
FR2821160A1 (en) * 2001-02-20 2002-08-23 Denso Corp CAPACITIVE TYPE MOISTURE SENSOR, AND METHOD FOR MANUFACTURING SAME

Also Published As

Publication number Publication date
JPH0115017B2 (en) 1989-03-15

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