JPH01143063U - - Google Patents
Info
- Publication number
- JPH01143063U JPH01143063U JP4019188U JP4019188U JPH01143063U JP H01143063 U JPH01143063 U JP H01143063U JP 4019188 U JP4019188 U JP 4019188U JP 4019188 U JP4019188 U JP 4019188U JP H01143063 U JPH01143063 U JP H01143063U
- Authority
- JP
- Japan
- Prior art keywords
- frequency
- voltage
- triangular wave
- axis scanning
- wave voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000003079 width control Methods 0.000 claims description 5
- 238000005468 ion implantation Methods 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 6
- 230000003247 decreasing effect Effects 0.000 claims 2
- 150000002500 ions Chemical class 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4019188U JPH01143063U (enExample) | 1988-03-25 | 1988-03-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4019188U JPH01143063U (enExample) | 1988-03-25 | 1988-03-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01143063U true JPH01143063U (enExample) | 1989-09-29 |
Family
ID=31266666
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4019188U Pending JPH01143063U (enExample) | 1988-03-25 | 1988-03-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01143063U (enExample) |
-
1988
- 1988-03-25 JP JP4019188U patent/JPH01143063U/ja active Pending
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