JPH01139426U - - Google Patents
Info
- Publication number
- JPH01139426U JPH01139426U JP3602788U JP3602788U JPH01139426U JP H01139426 U JPH01139426 U JP H01139426U JP 3602788 U JP3602788 U JP 3602788U JP 3602788 U JP3602788 U JP 3602788U JP H01139426 U JPH01139426 U JP H01139426U
- Authority
- JP
- Japan
- Prior art keywords
- operating lever
- cantilever
- board
- wafer boat
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000000463 material Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 1
Description
第１図ａ，ｂおよびｃは本考案に係る半導体製
造装置用のカンチレバーを示す斜視図とそのｂ―
ｂ線断面図、ｃ―ｃ線断面図、第２図は従来のカ
ンチレバーを用いた熱処理装置を示す断面図、第
３図は従来のカンチレバーを示す斜視図である。
１……反応管、４……半導体ウエハ、５……ウ
エハボート、１１……操作レバー、１２……開口
部、１３……ボード。
Figures 1a, b, and c are perspective views showing a cantilever for semiconductor manufacturing equipment according to the present invention;
2 is a sectional view showing a heat treatment apparatus using a conventional cantilever, and FIG. 3 is a perspective view showing a conventional cantilever. DESCRIPTION OF SYMBOLS 1...Reaction tube, 4...Semiconductor wafer, 5...Wafer boat, 11...Operation lever, 12...Opening, 13...Board.
Claims (1)
保持するウエハボートを搬送する操作レバーから
なり、この操作レバーに開口部を設けると共に、
前記ウエハボートを載置するボードを保持し、こ
のボードは前記操作レバーの熱伝導率より小さい
熱伝導率をもつ材料によつて形成されていること
を特徴とする半導体製造装置用のカンチレバー。 It consists of an operating lever for transporting a wafer boat that is inserted into and removed from the reaction tube and holds semiconductor wafers, and this operating lever is provided with an opening, and
A cantilever for semiconductor manufacturing equipment, wherein the cantilever holds a board on which the wafer boat is placed, and the board is made of a material having a thermal conductivity lower than that of the operating lever.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988036027U JPH0648835Y2 (en) | 1988-03-18 | 1988-03-18 | Cantilevers for semiconductor manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988036027U JPH0648835Y2 (en) | 1988-03-18 | 1988-03-18 | Cantilevers for semiconductor manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01139426U true JPH01139426U (en) | 1989-09-22 |
| JPH0648835Y2 JPH0648835Y2 (en) | 1994-12-12 |
Family
ID=31262647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988036027U Expired - Lifetime JPH0648835Y2 (en) | 1988-03-18 | 1988-03-18 | Cantilevers for semiconductor manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648835Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010141100A (en) * | 2008-12-11 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | Diffusion furnace device and diffusion method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59154017A (en) * | 1983-02-22 | 1984-09-03 | Mitsubishi Electric Corp | Furnace paddle for semiconductor wafer |
-
1988
- 1988-03-18 JP JP1988036027U patent/JPH0648835Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59154017A (en) * | 1983-02-22 | 1984-09-03 | Mitsubishi Electric Corp | Furnace paddle for semiconductor wafer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010141100A (en) * | 2008-12-11 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | Diffusion furnace device and diffusion method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648835Y2 (en) | 1994-12-12 |