JPH0113231B2 - - Google Patents

Info

Publication number
JPH0113231B2
JPH0113231B2 JP56186837A JP18683781A JPH0113231B2 JP H0113231 B2 JPH0113231 B2 JP H0113231B2 JP 56186837 A JP56186837 A JP 56186837A JP 18683781 A JP18683781 A JP 18683781A JP H0113231 B2 JPH0113231 B2 JP H0113231B2
Authority
JP
Japan
Prior art keywords
layer
silicon
oxide layer
silicon oxide
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56186837A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5889859A (ja
Inventor
Keisuke Shinozaki
Michiharu Hosoya
Keisuke Watanabe
Yoshio Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP56186837A priority Critical patent/JPS5889859A/ja
Publication of JPS5889859A publication Critical patent/JPS5889859A/ja
Publication of JPH0113231B2 publication Critical patent/JPH0113231B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP56186837A 1981-11-24 1981-11-24 シリコンウエ−ハ上へのマイクロ片持ち梁の作製法 Granted JPS5889859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56186837A JPS5889859A (ja) 1981-11-24 1981-11-24 シリコンウエ−ハ上へのマイクロ片持ち梁の作製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56186837A JPS5889859A (ja) 1981-11-24 1981-11-24 シリコンウエ−ハ上へのマイクロ片持ち梁の作製法

Publications (2)

Publication Number Publication Date
JPS5889859A JPS5889859A (ja) 1983-05-28
JPH0113231B2 true JPH0113231B2 (enrdf_load_stackoverflow) 1989-03-03

Family

ID=16195490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56186837A Granted JPS5889859A (ja) 1981-11-24 1981-11-24 シリコンウエ−ハ上へのマイクロ片持ち梁の作製法

Country Status (1)

Country Link
JP (1) JPS5889859A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5266531A (en) * 1991-01-30 1993-11-30 Cordata Incorporated Dynamic holographic display with cantilever
CA2154357C (en) * 1993-02-04 2004-03-02 Kevin A. Shaw Microstructures and single-mask, single-crystal process for fabrication thereof
US5426070A (en) * 1993-05-26 1995-06-20 Cornell Research Foundation, Inc. Microstructures and high temperature isolation process for fabrication thereof
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
FR2757941B1 (fr) * 1996-12-30 1999-01-22 Commissariat Energie Atomique Procede de realisation d'un element suspendu dans une structure micro-usinee
US6515751B1 (en) 1999-03-11 2003-02-04 Cornell Research Foundation Inc. Mechanically resonant nanostructures

Also Published As

Publication number Publication date
JPS5889859A (ja) 1983-05-28

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