JPS5889859A - シリコンウエ−ハ上へのマイクロ片持ち梁の作製法 - Google Patents

シリコンウエ−ハ上へのマイクロ片持ち梁の作製法

Info

Publication number
JPS5889859A
JPS5889859A JP56186837A JP18683781A JPS5889859A JP S5889859 A JPS5889859 A JP S5889859A JP 56186837 A JP56186837 A JP 56186837A JP 18683781 A JP18683781 A JP 18683781A JP S5889859 A JPS5889859 A JP S5889859A
Authority
JP
Japan
Prior art keywords
layer
silicon
cantilever
silicon oxide
oxide layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56186837A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0113231B2 (enrdf_load_stackoverflow
Inventor
Keisuke Shinozaki
篠崎　啓助
Michiharu Hosoya
細矢　路晴
Keisuke Watanabe
敬介 渡辺
Yoshio Kawai
義雄 川井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP56186837A priority Critical patent/JPS5889859A/ja
Publication of JPS5889859A publication Critical patent/JPS5889859A/ja
Publication of JPH0113231B2 publication Critical patent/JPH0113231B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass

Landscapes

  • Mechanical Optical Scanning Systems (AREA)
  • Semiconductor Integrated Circuits (AREA)
JP56186837A 1981-11-24 1981-11-24 シリコンウエ−ハ上へのマイクロ片持ち梁の作製法 Granted JPS5889859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56186837A JPS5889859A (ja) 1981-11-24 1981-11-24 シリコンウエ−ハ上へのマイクロ片持ち梁の作製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56186837A JPS5889859A (ja) 1981-11-24 1981-11-24 シリコンウエ−ハ上へのマイクロ片持ち梁の作製法

Publications (2)

Publication Number Publication Date
JPS5889859A true JPS5889859A (ja) 1983-05-28
JPH0113231B2 JPH0113231B2 (enrdf_load_stackoverflow) 1989-03-03

Family

ID=16195490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56186837A Granted JPS5889859A (ja) 1981-11-24 1981-11-24 シリコンウエ−ハ上へのマイクロ片持ち梁の作製法

Country Status (1)

Country Link
JP (1) JPS5889859A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5266531A (en) * 1991-01-30 1993-11-30 Cordata Incorporated Dynamic holographic display with cantilever
WO1994018697A1 (en) * 1993-02-04 1994-08-18 Cornell Research Foundation, Inc. Microstructures and single mask, single-crystal process for fabrication thereof
US5426070A (en) * 1993-05-26 1995-06-20 Cornell Research Foundation, Inc. Microstructures and high temperature isolation process for fabrication thereof
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
FR2757941A1 (fr) * 1996-12-30 1998-07-03 Commissariat Energie Atomique Procede de realisation d'un element suspendu dans une structure micro-usinee
US6515751B1 (en) 1999-03-11 2003-02-04 Cornell Research Foundation Inc. Mechanically resonant nanostructures

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5266531A (en) * 1991-01-30 1993-11-30 Cordata Incorporated Dynamic holographic display with cantilever
WO1994018697A1 (en) * 1993-02-04 1994-08-18 Cornell Research Foundation, Inc. Microstructures and single mask, single-crystal process for fabrication thereof
US5719073A (en) * 1993-02-04 1998-02-17 Cornell Research Foundation, Inc. Microstructures and single mask, single-crystal process for fabrication thereof
US5426070A (en) * 1993-05-26 1995-06-20 Cornell Research Foundation, Inc. Microstructures and high temperature isolation process for fabrication thereof
US5640133A (en) * 1995-06-23 1997-06-17 Cornell Research Foundation, Inc. Capacitance based tunable micromechanical resonators
FR2757941A1 (fr) * 1996-12-30 1998-07-03 Commissariat Energie Atomique Procede de realisation d'un element suspendu dans une structure micro-usinee
WO1998029720A1 (fr) * 1996-12-30 1998-07-09 Commissariat A L'energie Atomique Procede de realisation d'un element suspendu dans une structure micro-usinee
US6365056B1 (en) * 1996-12-30 2002-04-02 Commissariat A L'energie Atomique Method for producing a suspended element in a micro-machined structure
US6515751B1 (en) 1999-03-11 2003-02-04 Cornell Research Foundation Inc. Mechanically resonant nanostructures

Also Published As

Publication number Publication date
JPH0113231B2 (enrdf_load_stackoverflow) 1989-03-03

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