JPH01124924U - - Google Patents

Info

Publication number
JPH01124924U
JPH01124924U JP1916288U JP1916288U JPH01124924U JP H01124924 U JPH01124924 U JP H01124924U JP 1916288 U JP1916288 U JP 1916288U JP 1916288 U JP1916288 U JP 1916288U JP H01124924 U JPH01124924 U JP H01124924U
Authority
JP
Japan
Prior art keywords
heater
film forming
forming chamber
disk
cover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1916288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1916288U priority Critical patent/JPH01124924U/ja
Publication of JPH01124924U publication Critical patent/JPH01124924U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1916288U 1988-02-16 1988-02-16 Pending JPH01124924U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1916288U JPH01124924U (enrdf_load_stackoverflow) 1988-02-16 1988-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1916288U JPH01124924U (enrdf_load_stackoverflow) 1988-02-16 1988-02-16

Publications (1)

Publication Number Publication Date
JPH01124924U true JPH01124924U (enrdf_load_stackoverflow) 1989-08-25

Family

ID=31234428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1916288U Pending JPH01124924U (enrdf_load_stackoverflow) 1988-02-16 1988-02-16

Country Status (1)

Country Link
JP (1) JPH01124924U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144475A (en) * 1977-05-23 1978-12-15 Hitachi Ltd Sputtering apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53144475A (en) * 1977-05-23 1978-12-15 Hitachi Ltd Sputtering apparatus

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