JPS62136565U - - Google Patents

Info

Publication number
JPS62136565U
JPS62136565U JP2313386U JP2313386U JPS62136565U JP S62136565 U JPS62136565 U JP S62136565U JP 2313386 U JP2313386 U JP 2313386U JP 2313386 U JP2313386 U JP 2313386U JP S62136565 U JPS62136565 U JP S62136565U
Authority
JP
Japan
Prior art keywords
heater
substrates
film deposition
line film
deposition manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2313386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0230440Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2313386U priority Critical patent/JPH0230440Y2/ja
Publication of JPS62136565U publication Critical patent/JPS62136565U/ja
Application granted granted Critical
Publication of JPH0230440Y2 publication Critical patent/JPH0230440Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2313386U 1986-02-19 1986-02-19 Expired JPH0230440Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2313386U JPH0230440Y2 (enrdf_load_stackoverflow) 1986-02-19 1986-02-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2313386U JPH0230440Y2 (enrdf_load_stackoverflow) 1986-02-19 1986-02-19

Publications (2)

Publication Number Publication Date
JPS62136565U true JPS62136565U (enrdf_load_stackoverflow) 1987-08-28
JPH0230440Y2 JPH0230440Y2 (enrdf_load_stackoverflow) 1990-08-16

Family

ID=30821171

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2313386U Expired JPH0230440Y2 (enrdf_load_stackoverflow) 1986-02-19 1986-02-19

Country Status (1)

Country Link
JP (1) JPH0230440Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0230440Y2 (enrdf_load_stackoverflow) 1990-08-16

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