JPH0448263U - - Google Patents
Info
- Publication number
- JPH0448263U JPH0448263U JP9143690U JP9143690U JPH0448263U JP H0448263 U JPH0448263 U JP H0448263U JP 9143690 U JP9143690 U JP 9143690U JP 9143690 U JP9143690 U JP 9143690U JP H0448263 U JPH0448263 U JP H0448263U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum evaporation
- observation window
- substrate
- viewing port
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 3
- 239000002994 raw material Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9143690U JPH0448263U (enrdf_load_stackoverflow) | 1990-08-31 | 1990-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9143690U JPH0448263U (enrdf_load_stackoverflow) | 1990-08-31 | 1990-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0448263U true JPH0448263U (enrdf_load_stackoverflow) | 1992-04-23 |
Family
ID=31827066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9143690U Pending JPH0448263U (enrdf_load_stackoverflow) | 1990-08-31 | 1990-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448263U (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012184457A (ja) * | 2011-03-03 | 2012-09-27 | Sumitomo Heavy Ind Ltd | 成膜装置 |
-
1990
- 1990-08-31 JP JP9143690U patent/JPH0448263U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012184457A (ja) * | 2011-03-03 | 2012-09-27 | Sumitomo Heavy Ind Ltd | 成膜装置 |
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