JPH0448263U - - Google Patents
Info
- Publication number
- JPH0448263U JPH0448263U JP9143690U JP9143690U JPH0448263U JP H0448263 U JPH0448263 U JP H0448263U JP 9143690 U JP9143690 U JP 9143690U JP 9143690 U JP9143690 U JP 9143690U JP H0448263 U JPH0448263 U JP H0448263U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum evaporation
- observation window
- substrate
- viewing port
- raw material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims 3
- 239000002994 raw material Substances 0.000 claims 2
- 239000013078 crystal Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図Ａ及びＢは本考案になる真空蒸着装置の
一実施例を示す図で、特にビユーイングポートを
示す図、第２図はビユーイングポートの観察窓に
付着・吸着する分子の程度を比較説明する図、第
３図は一般的な真空蒸着装置の概略断面図、第４
図Ａ及びＢは従来の真空蒸着装置のビユーイング
ポートを示す図である。
１……ビユーイングポート、２……観察窓、３
……ヒータ線（加熱手段）、４……枠体、１０…
…真空蒸着装置、１１……チヤンバ。
Figures 1A and 1B are diagrams showing one embodiment of the vacuum evaporation apparatus according to the present invention, particularly showing the viewing port, and Figure 2 shows the extent of molecules adhering to and adsorbing on the viewing port observation window. Figure 3 is a schematic sectional view of a general vacuum evaporation apparatus, Figure 4 is a diagram for comparison and explanation.
Figures A and B are diagrams showing viewing ports of a conventional vacuum evaporation apparatus. 1...Viewing port, 2...Observation window, 3
... Heater wire (heating means), 4 ... Frame, 10 ...
...Vacuum evaporation equipment, 11...Chamber.
Claims (1)
気下で、結晶成長させる真空蒸着装置であつて、 前記基板が観察可能な観察窓を有するビユーイ
ングポートと、 前記ビユーイングポートの観察窓に設けた加熱
手段とからなることを特徴とする真空蒸着装置。 (2) ビユーイングポートの観察窓を介して、基
板に光を照射する手段を設けたことを特徴とする
請求項第１項記載の真空蒸着装置。[Claims for Utility Model Registration] (1) A vacuum evaporation device for supplying raw material molecules to a substrate and growing crystals in an atmosphere of the raw material molecules, comprising: a viewing port having an observation window through which the substrate can be observed; A vacuum evaporation apparatus comprising: heating means provided in the observation window of the viewing port. (2) The vacuum evaporation apparatus according to claim 1, further comprising means for irradiating light onto the substrate through the observation window of the viewing port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9143690U JPH0448263U (en) | 1990-08-31 | 1990-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9143690U JPH0448263U (en) | 1990-08-31 | 1990-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0448263U true JPH0448263U (en) | 1992-04-23 |
Family
ID=31827066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9143690U Pending JPH0448263U (en) | 1990-08-31 | 1990-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448263U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012184457A (en) * | 2011-03-03 | 2012-09-27 | Sumitomo Heavy Ind Ltd | Film forming device |
-
1990
- 1990-08-31 JP JP9143690U patent/JPH0448263U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012184457A (en) * | 2011-03-03 | 2012-09-27 | Sumitomo Heavy Ind Ltd | Film forming device |
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