JPS6211183U - - Google Patents
Info
- Publication number
- JPS6211183U JPS6211183U JP10157885U JP10157885U JPS6211183U JP S6211183 U JPS6211183 U JP S6211183U JP 10157885 U JP10157885 U JP 10157885U JP 10157885 U JP10157885 U JP 10157885U JP S6211183 U JPS6211183 U JP S6211183U
- Authority
- JP
- Japan
- Prior art keywords
- susceptor
- crucible
- single crystal
- melt
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000000565 sealant Substances 0.000 claims description 2
- 239000000155 melt Substances 0.000 claims 1
- 238000010899 nucleation Methods 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
図は本考案の半導体単結晶製造装置の実施例の
縦断面図である。
１……種子結晶、２……引上装置、３……液体
封止剤、４……融液、５……るつぼ、６……サセ
プタ、７……熱遮蔽盤、８……発熱体、１０……
高圧容器、１２……保持部材。
The figure is a longitudinal sectional view of an embodiment of the semiconductor single crystal manufacturing apparatus of the present invention. 1... seed crystal, 2... pulling device, 3... liquid sealant, 4... melt, 5... crucible, 6... susceptor, 7... heat shielding board, 8... heating element, 10...
High pressure container, 12...holding member.
Claims (1)
体融液が内部に収容され、かつ、回転駆動される
サセプタ内に配設されたるつぼと、該サセプタの
下面及び外周部を覆う発熱体と、上記るつぼ内の
上記融液から単結晶をシード付けし引き上げる種
子結晶が固定される上記るつぼ上方に配設された
保持部材とを設けたものにおいて、上記サセプタ
上部に円板状の熱遮蔽盤を取り付けたことを特徴
とする半導体単結晶製造装置。 A crucible disposed in a susceptor which houses a semiconductor melt whose upper surface is covered with a liquid sealant in a high-pressure container and is driven to rotate, and a heating element that covers the lower surface and outer periphery of the susceptor. and a holding member disposed above the crucible to which a seed crystal is fixed for seeding and pulling a single crystal from the melt in the crucible, wherein a disk-shaped heat shield is provided above the susceptor. Semiconductor single crystal manufacturing equipment characterized by having a board attached.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10157885U JPS6211183U (en) | 1985-07-03 | 1985-07-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10157885U JPS6211183U (en) | 1985-07-03 | 1985-07-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6211183U true JPS6211183U (en) | 1987-01-23 |
Family
ID=30972428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10157885U Pending JPS6211183U (en) | 1985-07-03 | 1985-07-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6211183U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01160894A (en) * | 1987-12-16 | 1989-06-23 | Mitsubishi Metal Corp | Apparatus for pulling up single crystal |
-
1985
- 1985-07-03 JP JP10157885U patent/JPS6211183U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01160894A (en) * | 1987-12-16 | 1989-06-23 | Mitsubishi Metal Corp | Apparatus for pulling up single crystal |
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